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Vyunov, Oleg
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Topics
Publications (16/16 displayed)
- 2022Materials based on barium titanate with colossal dielectric permittivity at high temperatures (Матеріали на основі титанату барію, що проявляють колосальну діелектричну проникність при високих температурах)
- 2020Synthesis and properties of ferroelectric semiconductors in the system (Ba1-x-ySryYx)TiO3
- 2019Synthesis and investigation of the properties of organic-inorganic perovskite films with non-contact optical methods
- 2018Synthesis and Properties of Condenser Materials with Colossal Permittivity Based on Complex Perovskites
- 2017Synthesis and Properties of Semiconductor BaTiO3 with a Colossal Dielectric Permittivity
- 2017Synthesis, Structure and Properties of Iron-Yttrium Garnets Joint Replacement with Aluminium and Manganese
- 2017Synthesis, Structure and Properties of Iron-Yttrium Garnets Joint Replacement with Aluminium and Manganese
- 2014Deposition of nanoscale LiPON films by high-frequency magnetron sputtering
- 2013Effect of oxidation temperature on the PTCR effect in the system of solid solutions (1-x)BaTiO3-x(Bi0.5K0.5)TiO3
- 2011Synthesis of materials based on (1-x)BaTiO3-x(Bi0.5K0.5)TiO3 exhibiting the PTCR effect
- 2011Synthesis and impedance measurements of ferroelectric semiconductors based on (1-x)BaTiO3-x(Bi0.5Na0.5)TiO3
- 2009Synthesis and properties of solid solutions (1–х–y)Pb(Zn₁⸝₃Nb₂⸝₃)O₃—xPbTiO₃—yBaTiO₃
- 2009Structural features of cubic solid solutions of the system ZrO₂—Y₂O₃—Fe₂O₃
- 2009Thermal stabilized ceramic heaters for work-support system of low-capacity automobile diesel engines of power unit
- 2008Influence of iron oxide (III) on degree of Y-ZrO₂ stabilization
- 2003Synthesis of microwave composite materials based on the MgO-TiO2-SiO2 system
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article
Deposition of nanoscale LiPON films by high-frequency magnetron sputtering
Abstract
The construction of laboratory installation for the fabrication of nanoscale amorphous films of lithium phosphorus oxynitride (LiPON) by high-frequency magnetron sputtering is described.