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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Lombardi, Floriana
General Electric (Finland)
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (9/9 displayed)
- 2024Integration of High-Tc Superconductors with High Q Factor Oxide Mechanical Resonators
- 2023Signature of quantum criticality in cuprates by charge density fluctuationscitations
- 2023Signature of quantum criticality in cuprates by charge density fluctuationscitations
- 2023Doping dependence of the upper critical field in untwinned YBCO thin filmscitations
- 2023Low-Vacuum Catalyst-Free Physical Vapor Deposition and Magnetotransport Properties of Ultrathin Bi2Se3 Nanoribbonscitations
- 2023Oxygen ordering in untwinned YBa2Cu3 O7-δ films driven by electrothermal stresscitations
- 2022Nanometric Moiré Stripes on the Surface of Bi2Se3Topological Insulatorcitations
- 2021Restored strange metal phase through suppression of charge density waves in underdoped YBCOcitations
- 2018Uniform doping of graphene close to the charge neutrality point by polymer-assisted spontaneous assembly of molecular dopantscitations
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article
Integration of High-Tc Superconductors with High Q Factor Oxide Mechanical Resonators
Abstract
Micro-mechanical resonators are building blocks of a variety of applications in basic science and applied electronics. This device technology is mainly based on well-established and reproducible silicon-based fabrication processes with outstanding performances in term of mechanical Q factor and sensitivity to external perturbations. Broadening the functionalities of MEMS by the integration of functional materials is a key step for both applied and fundamental science. However, combining functional materials and silicon-based compounds is challenging. An alternative approach is fabricating MEMS based on complex heterostructures made of materials inherently showing a variety of physical properties such as transition metal oxides. Here, we report on the integration of a high-Tc superconductor YBa2Cu3O7 (YBCO) with high Q factor micro-bridge resonator made of a single-crystal LaAlO3 (LAO) thin film. LAO resonators are tensile strained, with a stress of 345 MPa, show Q factor in the range of tens of thousands, and have low roughness. The topmost YBCO layer deposited by Pulse Laser Deposition shows a superconducting transition starting at 90 K with zero resistance below 78 K. This result opens new possibilities towards the development of advanced transducers, such as bolometers or magnetic field detectors, as well as basic science experiments in solid state physics, material science, and quantum opto-mechanics.