| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Pezoldt, Jörg
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (11/11 displayed)
- 2023Phase formation of cubic silicon carbide from reactive silicon-carbon multilayerscitations
- 2023Evaluation of Hysteresis Response in Achiral Edges of Graphene Nanoribbons on Semi-Insulating SiCcitations
- 2022Formation and Characterization of Three-Dimensional Tetrahedral MoS2 Thin Films by Chemical Vapor Depositioncitations
- 2022Characterization of pores in polished low temperature co-fired glass-ceramic composites for optimization of their micromachiningcitations
- 2022Self-aligning metallic vertical interconnect access formation through microlensing gas phase electrodeposition controlling airgap and morphologycitations
- 2022Size dependent properties of reactive materialscitations
- 2021Chemoheteroepitaxy of 3C-SiC(111) on Si(111): influence of predeposited Ge on structure and compositioncitations
- 2020Structural Analysis of Sputtered Sc(x)Al(1-x)N Layers for Sensor Applicationscitations
- 2018Magnetron sputtered AlN layers on LTCC multilayer and silicon substratescitations
- 2016Deformable printed circuit boards that enable metamorphic electronicscitations
- 2015Approaching gas phase electrodeposition: process and optimization to enable the self-aligned growth of 3D nanobridge-based interconnectscitations
Places of action
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article
Structural Analysis of Sputtered Sc(x)Al(1-x)N Layers for Sensor Applications
Abstract
<jats:p>Scandium aluminum nitride (ScxAl1-xN) is a promising material for sensor applications as it exhibits enhanced piezoelectric properties compared to pristine AlN while maintaining other advantageous properties like high thermal stability. Magnetoelectric sensors in particular are used to detect magnetic fields which leads to special requirements regarding the investigated ScAlN in order to achieve high sensor sensitivities. Co-sputtered ScAlN layers are investigated in this work using XRD, XPS, FTIR and Raman spectroscopy for scandium concentrations from 0 to 34 %. The impact of Sc incorporation regarding residual biaxial strain and bond softening is discussed on basis of the experimental results. The activity of the B1 and E2 modes found in the FTIR measurements is of special interest as the presumably oxygen related excitation is expected to influence the piezoelectric properties.</jats:p>