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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Alveringh, Dennis
University of Twente
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (4/4 displayed)
- 2024Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes
- 2018Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators
- 2018Inline relative permittivity sensing using silicon electrodes realized in surface channel technologycitations
- 2018Integrated throughflow mechanical microfluidic sensors
Places of action
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thesis
Integrated throughflow mechanical microfluidic sensors
Abstract
For many medical and industrial applications, measurement of flow is essential for continuous dosing of fluids. When other physical quantities of fluids are sensed next to flow, e.g. density and viscosity, the composition of the fluid can be obtained. Miniaturization of these sensors using microtechnology offers advantages in terms of resolution, mass production, channel wall material and internal volume.<br/><br/>The research described in this dissertation spans roughly two subjects:<br/>• resolution limit analysis and improvement of microfabricated Coriolis mass flow sensors;<br/>• Integration of flow, pressure, density, viscosity and relative permittivity sensors on a single chip.<br/>