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Hagen, Cornelis Wouter
Delft University of Technology
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (7/7 displayed)
- 2024Water-assisted purification during electron beam-induced deposition of platinum and goldcitations
- 2022Ultra-thin corrugated metamaterial film as large-area transmission dynodecitations
- 2021Secondary electron emission from multi-layered TiN/Al2O3transmission dynodescitations
- 2021Mechanical characterization of nanopillars by atomic force microscopycitations
- 2020‘Cleanroom’ in SEMcitations
- 2020Electron beam-induced deposition of platinum from Pt(CO)2Cl2 and Pt(CO)2Br2citations
- 2017Electron transport and room temperature single-electron charging in 10 nm scale PtC nanostructures formed by electron beam induced depositioncitations
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article
Water-assisted purification during electron beam-induced deposition of platinum and gold
Abstract
<p>Direct fabrication of pure metallic nanostructures is one of the main aims of focused electron beam-induced deposition (FEBID). It was recently achieved for gold deposits by the co-injection of a water precursor and the gold precursor Au(tfac)Me<sub>2</sub>. In this work results are reported, using the same approach, on a different gold precursor, Au(acac)Me<sub>2</sub>, as well as the frequently used platinum precursor MeCpPtMe<sub>3</sub>. As a water precursor MgSO<sub>4</sub>·7H<sub>2</sub>O was used. The purification during deposition led to a decrease of the carbon-to-gold ratio (in atom %) from 2.8 to 0.5 and a decrease of the carbon-to-platinum ratio (in atom %) from 6–7 to 0.2. The purification was done in a regular scanning electron microscope using commercially available components and chemicals, which paves the way for a broader application of direct etching-assisted FEBID to obtain pure metallic structures.</p>