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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Hagen, Cornelis Wouter
Delft University of Technology
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (7/7 displayed)
- 2024Water-assisted purification during electron beam-induced deposition of platinum and goldcitations
- 2022Ultra-thin corrugated metamaterial film as large-area transmission dynodecitations
- 2021Secondary electron emission from multi-layered TiN/Al2O3transmission dynodescitations
- 2021Mechanical characterization of nanopillars by atomic force microscopycitations
- 2020‘Cleanroom’ in SEMcitations
- 2020Electron beam-induced deposition of platinum from Pt(CO)2Cl2 and Pt(CO)2Br2citations
- 2017Electron transport and room temperature single-electron charging in 10 nm scale PtC nanostructures formed by electron beam induced depositioncitations
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article
Electron beam-induced deposition of platinum from Pt(CO)2Cl2 and Pt(CO)2Br2
Abstract
<p>Two platinum precursors, Pt(CO)<sub>2</sub>Cl<sub>2</sub> and Pt(CO)<sub>2</sub>Br<sub>2</sub>, were designed for focused electron beam-induced deposition (FEBID) with the aim of producing platinum deposits of higher purity than those deposited from commercially available precursors. In this work, we present the first deposition experiments in a scanning electron microscope (SEM), wherein series of pillars were successfully grown from both precursors. The growth of the pillars was studied as a function of the electron dose and compared to deposits grown from the commercially available precursor MeCpPtMe<sub>3</sub>. The composition of the deposits was determined using energy-dispersive X-ray spectroscopy (EDX) and compared to the composition of deposits from MeCpPtMe<sub>3</sub>, as well as deposits made in an ultrahigh-vacuum (UHV) environment. A slight increase in metal content and a higher growth rate are achieved in the SEM for deposits from Pt(CO)<sub>2</sub>Cl<sub>2</sub> compared to MeCpPtMe3. However, deposits made from Pt(CO)<sub>2</sub>Br<sub>2</sub> show slightly less metal content and a lower growth rate compared to MeCpPtMe<sub>3</sub>. With both Pt(CO)<sub>2</sub>Cl<sub>2</sub> and Pt(CO)<sub>2</sub>Br<sub>2</sub>, a marked difference in composition was found between deposits made in the SEM and deposits made in UHV. In addition to Pt, the UHV deposits contained halogen species and little or no carbon, while the SEM deposits contained only small amounts of halogen species but high carbon content. Results from this study highlight the effect that deposition conditions can have on the composition of deposits created by FEBID.</p>