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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Chiriaev, Serguei
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Topics
Publications (19/19 displayed)
- 2023Nanoscale thinning of metal-coated polypropylene films by Helium-ion irradiation
- 2023Nanoscale thinning of metal-coated polypropylene films by Helium-ion irradiation
- 2022Post-degradation case study of the membrane electrode assembly from a low-temperature PEMFC stack
- 2022Post-degradation case study of the membrane electrode assembly from a low-temperature PEMFC stack
- 2022Insights into Degradation of the Membrane–Electrode Assembly Performance in Low-Temperature PEMFC:the Catalyst, the Ionomer, or the Interface?citations
- 2022Insights into Degradation of the Membrane–Electrode Assembly Performance in Low-Temperature PEMFCcitations
- 2020Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beamscitations
- 2019Anomalous anisotropy in superconducting nanodiamond films induced by crystallite geometrycitations
- 2018FIB NANOPATTERNING OF METAL FILMS ON PMMA SUBSTRATES: NON-SPUTTERING MODE
- 2018Transition to Superwetting for a Nanostructured Surface
- 2018Transition to Superwetting for a Nanostructured Surface
- 2018Mapping the transition to superwetting state for nanotextured surfaces templated from block-copolymer self-assemblycitations
- 2018Mapping the transition to superwetting state for nanotextured surfaces templated from block-copolymer self-assemblycitations
- 2018Mapping the transition to superwetting state for nanotextured surfaces templated from block-copolymer self-assemblycitations
- 2017Helium Ion Microscopy of proton exchange membrane fuel cell electrode structurescitations
- 2017Helium Ion Microscopy of proton exchange membrane fuel cell electrode structurescitations
- 2016Challenges of fabricating plasmonic and photonic structures with Neon ion beam milling
- 2016Titanium Nitride as a Strain Gauge Materialcitations
- 2016Titanium Nitride as a Strain Gauge Materialcitations
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article
Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beams
Abstract
This work explores a new technique for the out-of-plane patterning of metal thin films prefabricated on the surface of a polymer substrate. This technique is based on an ion-beam-induced material modification in the bulk of the polymer. Effects of subsurface and surface processes on the surface morphology have been studied for three polymer materials: poly(methyl methacrylate), polycarbonate, and polydimethylsiloxane, by using focused ion beam irradiation with He+, Ne+, and Ga+. Thin films of a Pt60Pd40 alloy and of pristine Au were used to compare the patterning of thin films with different microstructures. We show that the height of Pt60Pd40 thin films deposited onto poly(methyl methacrylate) and polycarbonate substrates can be patterned by He+ ion beams with ultrahigh precision (nanometers) while preserving in-plane features, at the nanoscale, of the pre-deposited films. Ion irradiation of the Au-coated samples results in delamination, bulging, and perforation of the Au film, which is attributed to the accumulation of gases from radiolysis at the film–substrate interface. The irradiation with Ne+ and Ga+ ions destroys the films and roughens the surface due to dominating sputtering processes. A very different behavior, resulting in the formation of complex, multiscale 3D patterns, is observed for polydimethylsiloxane samples. The roles of the metal film structure, elastic properties of the polymer substrate, and irradiation-induced mechanical strain in the patterning process are elaborated and discussed.