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Publications (4/4 displayed)
- 2022A gas flow velocity sensor fabricated with femtosecond laser using 4 µm ultra-thin glass sheetcitations
- 2022A pressure driven electric energy generator exploiting a micro- to nano-scale glass porous filter with ion flow originating from watercitations
- 2021Focusing of Particles in a Microchannel with Laser Engraved Groove Arrayscitations
- 2021Hydrodynamic particle focusing enhanced by femtosecond laser deep grooving at low Reynolds numberscitations
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article
A gas flow velocity sensor fabricated with femtosecond laser using 4 µm ultra-thin glass sheet
Abstract
<jats:title>Abstract</jats:title><jats:p>Here we proposed a gas flow sensor enabled by 4 μm ultra-thin glass sheet with high-integration capability for applications in the fields of industry and medicine/health. The ultra-thin glass flow velocity sensor was fabricated with femtosecond laser processing in a time of several minutes, which can measure the gas flow velocity by detecting the displacement of the ultra-thin glass sheet in a large range of 4 m/s to 36 m/s with a sensitivity of 8.21 mV/(m/s). Furthermore, changing geometric parameters of the sensor, such as aspect ratio and thickness can adjust the sensitivity and dynamic range of the sensor.</jats:p>