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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Martin, Phil
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Topics
Publications (10/10 displayed)
- 2020Advanced RuO2 Thin Films for pH Sensing Applicationcitations
- 2018Fabrication of nitrogen-containing diamond-like carbon film by filtered arc deposition as conductive hard-coating filmcitations
- 2018Tuning the Plasmonic Response of TiN Nanoparticles Synthesised by the Transferred Arc Plasma Techniquecitations
- 2018Fabrication of sputtered titanium vanadium nitride (TiVN) thin films for micro-supercapacitorscitations
- 2018Cytocompatible tantalum films on Ti6Al4V substrate by filtered cathodic vacuum arc depositioncitations
- 2017Biomineralisation with Saos-2 bone cells on TiSiN sputtered Ti alloyscitations
- 2016Fabrication of Semiordered Nanopatterned Diamond-like Carbon and Titania Films for Blood Contacting Applicationscitations
- 2011Mechanical properties and scratch resistance of filtered-arc-deposited titanium oxide thin films on glasscitations
- 2011A review of high throughput and combinatorial electrochemistrycitations
- 2010Multilayered coatings: tuneable protection for metalscitations
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article
Advanced RuO2 Thin Films for pH Sensing Application
Abstract
RuO2 thin films were prepared using magnetron sputtering under different deposition conditions, including direct current (DC) and radio frequency (RF) discharges, metallic/oxide cathodes, different substrate temperatures, pressures, and deposition times. The surface morphology, residual stress, composition, crystal structure, mechanical properties, and pH performances of these RuO2 thin films were investigated. The RuO2 thin films RF sputtered from a metallic cathode at 250 °C exhibited good pH sensitivity of 56.35 mV/pH. However, these films were rougher, less dense, and relatively softer. However, the DC sputtered RuO2 thin film prepared from an oxide cathode at 250 °C exhibited a pH sensitivity of 57.37 mV/pH with a smoother surface, denser microstructure and higher hardness. The thin film RF sputtered from the metallic cathode exhibited better pH response than those RF sputtered from the oxide cathode due to the higher percentage of the RuO3 phase present in this film.