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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Niaura, Gediminas
Center for Physical Sciences and Technology
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (10/10 displayed)
- 2023Investigation of Hydrogen and Oxygen Evolution on Cobalt-Nanoparticles-Supported Graphitic Carbon Nitridecitations
- 2023Black Liquor and Wood Char-Derived Nitrogen-Doped Carbon Materials for Supercapacitorscitations
- 2022Wet Synthesis of Graphene-Polypyrrole Nanocomposites via Graphite Intercalation Compoundscitations
- 2022Design and Characterization of Nanostructured Titanium Monoxide Films Decorated with Polyaniline Speciescitations
- 2022Green Removal of DUV-Polarity-Modified PMMA for Wet Transfer of CVD Graphenecitations
- 2022Structural Control and Electrical Behavior of Thermally Reduced Graphene Oxide Samples Assisted with Malonic Acid and Phosphorus Pentoxidecitations
- 2022Synthesis and Characterization of Graphite Intercalation Compounds with Sulfuric Acidcitations
- 2022The direct growth of planar and vertical graphene on Si(100) <i>via</i> microwave plasma chemical vapor deposition: synthesis conditions effectscitations
- 2018Wood-Based Carbon Materials Modified with Cobalt Nanoparticles As Catalysts for Oxygen Reduction and Hydrogen Oxidation
- 2017AlAs as a Bi blocking barrier in GaAsBi multi-quantum wells: Structural analysiscitations
Places of action
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article
Green Removal of DUV-Polarity-Modified PMMA for Wet Transfer of CVD Graphene
Abstract
<jats:p>To fabricate graphene-based high-frequency electronic and optoelectronic devices, there is a high demand for scalable low-contaminated graphene with high mobility. Graphene synthesized via chemical vapor deposition (CVD) on copper foil appears promising for this purpose, but residues from the polymethyl methacrylate (PMMA) layer, used for the wet transfer of CVD graphene, drastically affect the electrical properties of graphene. Here, we demonstrate a scalable and green PMMA removal technique that yields high-mobility graphene on the most common technologically relevant silicon (Si) substrate. As the first step, the polarity of the PMMA was modified under deep-UV irradiation at λ = 254 nm, due to the formation of ketones and aldehydes of higher polarity, which simplifies hydrogen bonding in the step of its dissolution. Modification of PMMA polarity was confirmed by UV and FTIR spectrometry and contact angle measurements. Consecutive dissolution of DUV-exposed PMMA in an environmentally friendly, binary, high-polarity mixture of isopropyl alcohol/water (more commonly alcohol/water) resulted in the rapid and complete removal of DUV-exposed polymers without the degradation of graphene properties, as low-energy exposure does not form free radicals, and thus the released graphene remained intact. The high quality of graphene after PMMA removal was confirmed by SEM, AFM, Raman spectrometry, and by contact and non-contact electrical conductivity measurements. The removal of PMMA from graphene was also performed via other common methods for comparison. The charge carrier mobility in graphene films was found to be up to 6900 cm2/(V·s), demonstrating a high potential of the proposed PMMA removal method in the scalable fabrication of high-performance electronic devices based on CVD graphene.</jats:p>