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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Huth, Michael
European Commission
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (19/19 displayed)
- 2024Nanoscale, surface-confined phase separation by electron beam induced oxidationcitations
- 2024Gas-Phase Synthesis of Iron Silicide Nanostructures Using a Single-Source Precursorcitations
- 2023Pillar Growth by Focused Electron Beam-Induced Deposition Using a Bimetallic Precursor as Model Systemcitations
- 2022Vanadium and Manganese Carbonyls as Precursors in Electron-Induced and Thermal Deposition Processes
- 2022Direct-Write 3D Nanoprinting of High-Resolution Magnetic Force Microscopy Nanoprobes
- 2022Precursors for Direct-Write Nanofabrication with Electrons
- 2022Highly-packed proximity-coupled DC Josephson junction arrays by a direct-write approachcitations
- 2022Focused Ion Beam vs Focused Electron Beam Deposition of Cobalt Silicide Nanostructures Using Single-Source Precursorscitations
- 2021AC conductivity and correlation effects in nano-granular Pt/Ccitations
- 2021Engineered Magnetization and Exchange Stiffness in Direct-Write Co-Fe Nanoelementscitations
- 2018Preparation of polymer/clay hybrid encapsulation for barrier applications controlled by Hansen Solubility Parameters
- 2014Charge transfer tuning by chemical substitution and uniaxial pressure in the organic complex tetramethoxypyrene–tetracyanoquinodimethanecitations
- 2014Magnetization reversal assisted by half antivortex states in nanostructured circular cobalt diskscitations
- 2013Variable tunneling barriers in FEBID based PtC metal-matrix nanocomposites as a transducing element for humidity sensingcitations
- 2012Spontaneous dissociation of Co 2 (CO) 8 and autocatalytic growth of Co on SiO 2: a combined experimental and theoretical investigationcitations
- 2012Focused electron beam induced deposition: a perspectivecitations
- 2012Electrical transport and pinning properties of Nb thin films patterned with focused ion beam-milled washboard nanostructurescitations
- 2012Spontaneous dissociation of Co₂(CO)₈ and autocatalytic growth of Co on SiO₂: A combined experimental and theoretical investigationcitations
- 2010A tunable strain sensor using nanogranular metalscitations
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article
Vanadium and Manganese Carbonyls as Precursors in Electron-Induced and Thermal Deposition Processes
Abstract
The material composition and electrical properties of nanostructures obtained from focused electron beam-induced deposition (FEBID) using manganese and vanadium carbonyl precursors have been investigated. The composition of the FEBID deposits has been compared with thin films derived by the thermal decomposition of the same precursors in chemical vapor deposition (CVD). FEBID of V(CO)6 gives access to a material with a V/C ratio of 0.63–0.86, while in CVD a lower carbon content with V/C ratios of 1.1–1.3 is obtained. Microstructural characterization reveals for V-based materials derived from both deposition techniques crystallites of a cubic phase that can be associated with VC1−xOx. In addition, the electrical transport measurements of direct-write VC1−xOx show moderate resistivity values of 0.8–1.2 × 103 µΩ·cm, a negligible influence of contact resistances and signatures of a granular metal in the temperature-dependent conductivity. Mn-based deposits obtained from Mn2(CO)10 contain ~40 at% Mn for FEBID and a slightly higher metal percentage for CVD. Exclusively insulating material has been observed in FEBID deposits as deduced from electrical conductivity measurements. In addition, strong tendencies for postgrowth oxidation have to be considered.