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Publications (5/5 displayed)
- 2024Conformal SiO₂ coating of sub-100 nm diameter channels of polycarbonate etched ion-track channels by atomic layer deposition
- 2024Nanoscale Structuring in Confined Geometries using Atomic Layer Deposition: Conformal Coating and Nanocavity Formation
- 2021Conical Nanotubes Synthesized by Atomic Layer Deposition of Al2O3, TiO2, and SiO2 in Etched Ion-Track Nanochannelscitations
- 2018The Li-storage capacity of SiOC glasses with and without mixed silicon oxycarbide bondscitations
- 2018Nanoscale Structuring in Confined Geometries using Atomic Layer Depositioncitations
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article
Conical Nanotubes Synthesized by Atomic Layer Deposition of Al2O3, TiO2, and SiO2 in Etched Ion-Track Nanochannels
Abstract
<jats:p>Etched ion-track polycarbonate membranes with conical nanochannels of aspect ratios of ~3000 are coated with Al2O3, TiO2, and SiO2 thin films of thicknesses between 10 and 20 nm by atomic layer deposition (ALD). By combining ion-track technology and ALD, the fabrication of two kinds of functional structures with customized surfaces is presented: (i) arrays of free-standing conical nanotubes with controlled geometry and wall thickness, interesting for, e.g., drug delivery and surface wettability regulation, and (ii) single nanochannel membranes with inorganic surfaces and adjustable isoelectric points for nanofluidic applications.</jats:p>