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| Naji, M. |
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Utke, Ivo
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Topics
Publications (58/58 displayed)
- 2024Effect of hydrogen on the chemical state, stoichiometry and density of amorphous Al 2 O 3 films grown by thermal atomic layer depositioncitations
- 2024Effect of hydrogen on the chemical state, stoichiometry and density of amorphous Al<sub>2</sub>O<sub>3</sub> films grown by thermal atomic layer depositioncitations
- 2024Unraveling the highly plastic behavior of ALD‐aluminum oxide encapsulations by small‐scale tensile testingcitations
- 2024Unraveling interdiffusion phenomena and the role of nanoscale diffusion barriers in the copper-gold systemcitations
- 2024Unraveling the Highly Plastic Behavior of ALD‐Aluminum Oxide Encapsulations by Small‐Scale Tensile Testingcitations
- 2023Roadmap for focused ion beam technologiescitations
- 2023Roadmap for focused ion beam technologiescitations
- 2022Mechanical properties of atomic-layer-deposited Al 2 O 3 /Y 2 O 3 nanolaminate films on aluminum toward protective coatingscitations
- 2022On the thinnest Al 2 O 3 interlayers in Al‐based nanolaminates to enhance strength, and the role of constraintcitations
- 2022Vacuum versus ambient pressure inert gas thermogravimetry: a study of silver carboxylatescitations
- 2022In situ time-of-flight mass spectrometry of ionic fragments induced by focused electron beam irradiation: investigation of electron driven surface chemistry inside an SEM under high vacuumcitations
- 2022Real-time in situ parallel detection of elements and molecules with TOFMS during ALD for chemical quality control of thin filmscitations
- 2021High sensitivity of fluorine gas-assisted FIB-TOF-SIMS for chemical characterization of buried sublayers in thin filmscitations
- 2021Solving the inverse Knudsen problem: gas diffusion in random fibrous mediacitations
- 2021Structure, morphology, heat capacity, and electrical transport properties of ti 3 (Al,si)c 2 materialscitations
- 2021Practical aspects of focused ion beam time-of-flight secondary ion mass spectrometry analysis enhanced by fluorine gas coinjectioncitations
- 2021Mechanics of nanoscale ϵ-Fe 2 O 3 /organic superlattices toward flexible thin-film magnetscitations
- 2020Metals by Micro‐Scale Additive Manufacturing: Comparison of Microstructure and Mechanical Propertiescitations
- 2020Thin-film engineering of mechanical fragmentation properties of atomic-layer-deposited metal oxidescitations
- 2020Interfacial adhesion of alumina thin films over the full compositional range of ternary fcc alloy films: a combinatorial nanoindentation studycitations
- 2020Annealed cobalt-carbon nanocomposites for room-temperature spintronic applicationscitations
- 2020Metals by micro-scale additive manufacturing: comparison of microstructure and mechanical propertiescitations
- 2020Synthesis of model Al-Al 2 O 3 multilayer systems with monolayer oxide thickness control by circumventing native oxidationcitations
- 2020Molecular layer deposited alucone thin films from long-chain organic precursors: from brittle to ductile mechanical characteristicscitations
- 2019Fracture Mechanics and Oxygen Gas Barrier Properties of Al2O3/ZnO Nanolaminates on PET Deposited by Atomic Layer Depositioncitations
- 2019Fracture mechanics and oxygen gas barrier properties of Al 2 O 3 /ZnO nanolaminates on PET deposited by atomic layer depositioncitations
- 2019A novel copper precursor for electron beam induced deposition
- 2018Comparative study of post-growth annealing of Cu(hfac) 2 , Co 2 (CO) 8 and Me 2 Au(acac) metal precursors deposited by FEBIDcitations
- 2018Magnetoelectrical transport improvements of postgrowth annealed iron–cobalt nanocomposites: a possible route for future room-temperature spintronicscitations
- 2018A novel copper precursor for electron beam induced depositioncitations
- 2018Comparative study of post-growth annealing of Cu(hfac)2, Co2(CO)8 and Me2Au(acac) metal precursors deposited by FEBID
- 2017Boron nitride nanoporous membranes with high surface charge by atomic layer depositioncitations
- 2017Atomic layer deposition of titanium oxide on single-layer graphene: an atomic-scale study toward understanding nucleation and growthcitations
- 2017Reaction and growth mechanisms in Al 2 O 3 deposited via atomic layer deposition: elucidating the hydrogen sourcecitations
- 2017Boron Nitride Nanoporous Membranes with High Surface Charge by Atomic Layer Depositioncitations
- 2016High conformity and large domain monocrystalline anatase on multiwall carbon nanotube core–shell nanostructure: synthesis, structure, and interfacecitations
- 2016Role of NH3 in the Electron-Induced Reactions of Adsorbed and Solid Cisplatincitations
- 2016Role of NH 3 in the electron-induced reactions of adsorbed and solid cisplatincitations
- 2016Annealing-based electrical tuning of cobalt–carbon deposits grown by focused-electron-beam-induced depositioncitations
- 2016Surface passivation for reliable measurement of bulk electronic properties of heterojunction devicescitations
- 2014Growth and characterization of CNT–TiO 2 heterostructurescitations
- 2014Lateral resolution in focused electron beam-induced deposition: scaling laws for pulsed and static exposurecitations
- 2014Modeling and optimization of atomic layer deposition processes on vertically aligned carbon nanotubescitations
- 2014The nanoscale implications of a molecular gas beam during electron beam induced depositioncitations
- 2014Use of radiofrequency power to enable glow discharge optical emission spectroscopy ultrafast elemental mapping of combinatorial libraries with nonconductive components: nitrogen-based materialscitations
- 2013Single superparamagnetic bead detection and direct tracing of bead position using novel nanocomposite nano-hall sensorscitations
- 2012High spatial resolution time-of-flight secondary ion mass spectrometry for the masses: a novel orthogonal ToF FIB-SIMS instrument with in situ AFMcitations
- 2012Single paramagnetic bead detection and direct measurement of the spatial magnetic resolution using novel nanocomposite Hall sensors
- 2012Focused ion and electron beam induced deposition of magnetic nanostructures
- 2011In situ characterization of tensile-bending load bearing ability of multi-walled carbon nanotubes in alumina-based nanocompositescitations
- 2011Low-energy electron-induced decomposition and reactions of adsorbed tetrakis(trifluorophosphine)platinum [Pt(PF 3 ) 4 ]citations
- 2011Determination of the surface diffusion coefficient and the residence time of adsorbates via local focused electron beam induced chemical vapour depositioncitations
- 2010Improving the metallic content of focused electron beam-induced deposits by a scanning electron microscope integrated hydrogen-argon microplasma generatorcitations
- 2010Small, minimally invasive, direct: electrons induce local reactions of adsorbed functional molecules on the nanoscalecitations
- 2009In situ tensile testing of individual Co nanowires inside a scanning electron microscopecitations
- 2008Controlled focused electron beam-induced etching for the fabrication of sub-beam-size nanoholescitations
- 2006Local electron beam induced reduction and crystallization of amorphous titania filmscitations
- 2006Measurement of the bending strength of vapor-liquid-solid grown silicon nanowirescitations
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article
Thin-film engineering of mechanical fragmentation properties of atomic-layer-deposited metal oxides
Abstract
Mechanical fracture properties were studied for the common atomic-layer-deposited Al 2 O 3 , ZnO, TiO 2 , ZrO 2 , and Y 2 O 3 thin films, and selected multilayer combinations via uniaxial tensile testing and Weibull statistics. The crack onset strains and interfacial shear strains were studied, and for crack onset strain, TiO 2 /Al 2 O 3 and ZrO 2 /Al 2 O 3 bilayer films exhibited the highest values. The films adhered well to the polyimide carrier substrates, as delamination of the films was not observed. For Al 2 O 3 films, higher deposition temperatures resulted in higher crack onset strain and cohesive strain values, which was explained by the temperature dependence of the residual strain. Doping Y 2 O 3 with Al or nanolaminating it with Al 2 O 3 enabled control over the crystal size of Y 2 O 3 , and provided us with means for improving the mechanical properties of the Y 2 O 3 films. Tensile fracture toughness and fracture energy are reported for Al 2 O 3 films grown at 135 ◦ C, 155°C, and 220 ◦ C. We present thin-film engineering via multilayering and residual-strain control in order to tailor the mechanical properties of thin-film systems for applications requiring mechanical stretchability and flexibility.