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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Wolff, Niklas
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (15/15 displayed)
- 2024Demonstration and STEM Analysis of Ferroelectric Switching in MOCVD‐Grown Single Crystalline Al0.85Sc0.15Ncitations
- 2024Demonstration and STEM Analysis of Ferroelectric Switching in MOCVD‐Grown Single Crystalline Al<sub>0.85</sub>Sc<sub>0.15</sub>Ncitations
- 2023Unlocking High‐Performance Supercapacitor Behavior and Sustained Chemical Stability of 2D Metallic CrSe<sub>2</sub> by Optimal Electrolyte Selectioncitations
- 2023Synthesis and Nanostructure Investigation of Hybrid β-Ga2 O3 /ZnGa2 O4 Nanocomposite Networks with Narrow-Band Green Luminescence and High Initial Electrochemical Capacitycitations
- 2022Ultrathin Al1−xScxN for Low‐Voltage‐Driven Ferroelectric‐Based Devicescitations
- 2022Investigation of Wafer-Level Fabricated Permanent Micromagnets for MEMScitations
- 2022Control of magnetoelastic coupling in Ni/Fe multilayers using He+ ion irradiationcitations
- 2021Atomic scale confirmation of ferroelectric polarization inversion in wurtzite-type AlScNcitations
- 2020Facile fabrication of semiconducting oxide nanostructures by direct ink writing of readily available metal microparticles and their application as low power acetone gas sensorscitations
- 2020Nanocharacterization of Functional Materials for Biomagnetic Sensing an Breath Analysis ; Charakterisierung funktionaler Nanomaterialien für biomagnetische Sensoren und Atemanalyse
- 2019Low-Temperature Solution Synthesis of Au-Modified ZnO Nanowires for Highly Efficient Hydrogen Nanosensorscitations
- 2019The effect of morphology and functionalization on UV detection properties of ZnO networked tetrapods and single nanowirescitations
- 2018Zinc oxide nanotetrapods with four different arm morphologies for versatile nanosensorscitations
- 2018ZnAl2O4-Functionalized Zinc Oxide Microstructures for Highly Selective Hydrogen Gas Sensing Applicationscitations
- 2016Single and networked CuO nanowires for highly sensitive p-type semiconductor gas sensor applicationscitations
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article
Investigation of Wafer-Level Fabricated Permanent Micromagnets for MEMS
Abstract
Monolithic integration of permanent micromagnets into MEMS structures offers many advantages in magnetic MEMS applications. A novel technique called PowderMEMS, based on the agglomeration of micron-sized powders by atomic layer deposition (ALD), has been used to fabricate permanent micromagnets on 8-inch wafers. In this paper, we report the fabrication and magnetic characterization of PowderMEMS micromagnets prepared from two different NdFeB powder particle sizes. A remanence of 423 mT and intrinsic coercivity of 924 mT is achieved at the low ALD process temperature of 75 °C, making this process compatible with MEMS technology. The magnetic reversible mechanism in the micromagnets is discussed with the help of the Wohlfarth equation. To ensure the operability of such integrated micromagnets in different application environments, we conducted a set of experiments to systematically investigate the thermal and corrosive stability. NdFeB micromagnets with larger powder particle size (d50 = 25 μm) exhibit high thermal stability in air. Furthermore, the corrosion stability of the micromagnets is significantly improved by an additional silicon oxide passivation layer deposited by plasma-enhanced chemical vapor deposition (PECVD). The presented results demonstrate the durability of PowderMEMS micromagnets, enabling their application in various fields, e.g., microfluidics, sensors, actuators, and microelectronics. ; 13 ; 5