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Melzer, Marcel
Fraunhofer Institute for Electronic Nano Systems
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (7/7 displayed)
- 2022Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrorscitations
- 2022Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrorscitations
- 2021Design and technology for uniform aluminum nitride piezoelectric micromachined ultrasonic transducers with radial arraycitations
- 2021Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitridecitations
- 2020On the relationship between SiF4plasma species and sample properties in ultra low-k etching processes
- 20202D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitridecitations
- 2016Manganese half-sandwich complexes as metal-organic chemical vapor deposition precursors for manganese-based thin filmscitations
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article
Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors
Abstract
<jats:p>Piezoelectric micromirrors with aluminum nitride (AlN) and aluminum scandium nitride (Al0.68Sc0.32N) are presented and compared regarding their static deflection. Two chip designs with 2 × 3 mm2 (Design 1) and 4 × 6 mm2 (Design 2) footprint with 600 nm AlN or 2000 nm Al0.68Sc0.32N as piezoelectric transducer material are investigated. The chip with Design 1 and Al0.68Sc0.32N has a resonance frequency of 1.8 kHz and a static scan angle of 38.4° at 400 V DC was measured. Design 2 has its resonance at 2.1 kHz. The maximum static scan angle is 55.6° at 220 V DC, which is the maximum deflection measurable with the experimental setup. The static deflection per electric field is increased by a factor of 10, due to the optimization of the design and the research and development of high-performance piezoelectric transducer materials with large piezoelectric coefficient and high electrical breakthrough voltage.</jats:p>