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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Krywka, Christina
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (13/13 displayed)
- 2023Local Structural Modifications in Metallic Micropillars Induced by Plasma Focused Ion Beam Processingcitations
- 2023Influence of the deposition process and substrate on microstructure, phase composition, and residual stress state on as-deposited Cr-Al-C coatingscitations
- 2023A high-speed x-ray radiography setup for in-situ electron beam powder bed fusion at PETRA IIIcitations
- 2022Influence of the Deposition Process and Substrate on Microstructure, Phase Composition, and Residual Stress State on As-Deposited Cr-Al-C Coatingscitations
- 2022Mapping structure heterogeneities and visualizing moisture degradation of perovskite films with nano-focus WAXScitations
- 2021Carbonate substitution significantly affects the structure and mechanics of carbonated apatitescitations
- 2021Deformation Behavior of Cross-Linked Supercrystalline Nanocomposites: An in Situ SAXS/WAXS Study during Uniaxial Compressioncitations
- 2021X-ray diffraction and in situ pressurization of dentine apatite reveals nanocrystal modulus stiffening upon carbonate removalcitations
- 2021Deformation Behavior of Cross-Linked Supercrystalline Nanocompositescitations
- 2019Hierarchical architecture of spider attachment setae reconstructed from scanning nanofocus X-ray diffraction datacitations
- 2016In-situ Observation of Cross-Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentationcitations
- 2016Analysis of residual stress formation in additive manufacturing of Ti-6Al-4V
- 2007The small-angle and wide-angle X-ray scattering set-up at beamline BL9 of DELTAcitations
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article
Local Structural Modifications in Metallic Micropillars Induced by Plasma Focused Ion Beam Processing
Abstract
A focused ion beam scanning electron microscope (FIB-SEM) is a powerful tool that is routinely used for scale imaging from the micro- to nanometer scales, micromachining, prototyping, and metrology. In spite of the significant capabilities of a FIB-SEM, there are inherent artefacts (e.g., structural defects, chemical interactions and phase changes, ion implantation, and material redeposition) that are produced due to the interaction of Ga$^+$ or other types of ions (e.g., Xe$^+$, Ar$^+$, O$^+$, etc.) with the sample. In this study, we analyzed lattice distortion and ion implantation and subsequent material redeposition in metallic micropillars which were prepared using plasma focus ion beam (PFIB) milling. We utilized non-destructive synchrotron techniques such as X-ray fluorescence (XRF) and X-ray nanodiffraction to examine the micropillars prepared using Xe$^+$ ion energies of 10 keV and 30 keV. Our results demonstrate that higher Xe ion energy leads to higher density of implanted ions within the redeposited and milled material. The mixing of ions in the redeposited material significantly influences the lattice structure, causing deformation in regions with higher ion concentrations. Through an X-ray nanodiffraction analysis, we obtained numerical measurements of the strain fields induced in the regions, which revealed up to 0.2% lattice distortion in the ion bombardment direction.