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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Davydok, Anton
Helmholtz-Zentrum Hereon
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (14/14 displayed)
- 2024Chelating agent stimulated LDH post-treatment of PEO coated AA2024citations
- 2024Sheep Bone Ultrastructure Analyses Reveal Differences in Bone Maturation around Mg-Based and Ti Implants
- 2023Local Structural Modifications in Metallic Micropillars Induced by Plasma Focused Ion Beam Processingcitations
- 2023Computational thermodynamics and kinetics-guided re-engineering of a high-performance tool steelcitations
- 2023Influence of the deposition process and substrate on microstructure, phase composition, and residual stress state on as-deposited Cr-Al-C coatingscitations
- 2022Influence of the Deposition Process and Substrate on Microstructure, Phase Composition, and Residual Stress State on As-Deposited Cr-Al-C Coatingscitations
- 2022Mapping structure heterogeneities and visualizing moisture degradation of perovskite films with nano-focus WAXScitations
- 2022Local structure mapping of gel-spun ultrahigh-molecular-weight polyethylene fiberscitations
- 2021Deformation Behavior of Cross-Linked Supercrystalline Nanocomposites: An in Situ SAXS/WAXS Study during Uniaxial Compressioncitations
- 2021Grain boundary formation through particle detachment during coarsening of nanoporous metalscitations
- 2021In-Situ Coupling Applied Voltage and Synchrotron Radiation: Operando Characterization of Transistors
- 2021Deformation Behavior of Cross-Linked Supercrystalline Nanocompositescitations
- 2014Role of Liquid Indium in the Structural Purity of Wurtzite InAs Nanowires That Grow on Si(111)citations
- 2013X-ray diffraction analysis of InAs nanowires ; Röntgenbeugungsanalyse von InAs Nanodrähten
Places of action
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article
Local Structural Modifications in Metallic Micropillars Induced by Plasma Focused Ion Beam Processing
Abstract
A focused ion beam scanning electron microscope (FIB-SEM) is a powerful tool that is routinely used for scale imaging from the micro- to nanometer scales, micromachining, prototyping, and metrology. In spite of the significant capabilities of a FIB-SEM, there are inherent artefacts (e.g., structural defects, chemical interactions and phase changes, ion implantation, and material redeposition) that are produced due to the interaction of Ga$^+$ or other types of ions (e.g., Xe$^+$, Ar$^+$, O$^+$, etc.) with the sample. In this study, we analyzed lattice distortion and ion implantation and subsequent material redeposition in metallic micropillars which were prepared using plasma focus ion beam (PFIB) milling. We utilized non-destructive synchrotron techniques such as X-ray fluorescence (XRF) and X-ray nanodiffraction to examine the micropillars prepared using Xe$^+$ ion energies of 10 keV and 30 keV. Our results demonstrate that higher Xe ion energy leads to higher density of implanted ions within the redeposited and milled material. The mixing of ions in the redeposited material significantly influences the lattice structure, causing deformation in regions with higher ion concentrations. Through an X-ray nanodiffraction analysis, we obtained numerical measurements of the strain fields induced in the regions, which revealed up to 0.2% lattice distortion in the ion bombardment direction.