• Lipateva, Tatiana
• Sigaev, Vladimir
• Fedotov, Sergey
• Lipatiev, Alexey
• Lotarev, Sergey

Abstract

<jats:p>In this study, a simple one-stage laser-assisted metallization technique based on laser-induced backside wet etching and laser-induced chemical liquid-phase deposition is proposed. It allows for the fabrication of gold micropatterns inside the laser-written trace on a glass substrate. The reduction and deposition of gold inside and outside the laser-ablated channel were confirmed. The presence of Au nanoparticles on the surface of the laser-written micropattern is revealed by atomic force microscopy. The specific resistivity of the gold trace formed by ultrafast light-assisted metal micropatterning on a dielectric glass substrate is estimated as 0.04 ± 0.02 mΩ·cm. The obtained results empower the method of the selective laser-assisted deposition of metals on dielectrics and are of interest for the development of microelectronic components and catalysts, heaters, and sensors for lab-on-a-chip devices.</jats:p>

Topics

• nanoparticle
• Deposition
• impedance spectroscopy
• surface
• resistivity
• phase
• atomic force microscopy
• glass
• glass
• gold
• wet etching