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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Gerlach, Gerald
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (12/12 displayed)
- 2022Optimization of LPCVD phosphorous-doped SiGe thin films for CMOS-compatible thermoelectric applicationscitations
- 2022Integrated Temperature and Position Sensors in a Shape-Memory Driven Soft Actuator for Closed-Loop Controlcitations
- 2022Effect of Barium Titanate Particle Filler in Soft Silicone Films on their Application in Dielectric Elastomer Actuatorscitations
- 2021RF-Characterization of HZO Thin Film Varactorscitations
- 2020Morphological characterization and porosity profiles of tantalum glancing-angle-deposited thin filmscitations
- 2019Plasmonic sensor for on-site detection of diclofenac moleculescitations
- 2018Development and testing of controlled adaptive fiber-reinforced elastomer composites.citations
- 2018Development and testing of controlled adaptive fiber-reinforced elastomer compositescitations
- 2013Plasma deposition of hydrophobic coatings on structured surfaces for condensation and heat transfer
- 2011Novel approaches for the determination of the process specific polarization of piezoceramic modules embedded in thermoplastic composites
- 2010Neuartige Ansätze für selbstdiagnostizierende und selbstregulierende Mehrkomponentenwerkstoffe in Leichtbauanwendungen
- 2005pH sensors based on polyelectrolytic hydrogelscitations
Places of action
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article
RF-Characterization of HZO Thin Film Varactors
Abstract
<jats:p>A microwave characterization at UHF band of a ferroelectric hafnium zirconium oxide metal-ferroelectric-metal (MFM) capacitors for varactor applications has been performed. By using an impedance reflectivity method, a complex dielectric permittivity was obtained at frequencies up to 500 MHz. Ferroelectric Hf0.5Zr0.5O2 of 10 nm thickness has demonstrated a stable permittivity switching in the whole frequency range. A constant increase of the calculated dielectric loss is observed, which is shown to be an effect of electric field distribution on highly resistive titanium nitride (TiN) thin film electrodes. The C-V characteristics of a “butterfly” shape was also extracted, where the varactors exhibited a reduction of capacitance tunability from 18.6% at 10 MHz to 15.4% at 500 MHz.</jats:p>