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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Ferreira, Fábio
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (9/9 displayed)
- 2024Sustainable lubrication through Gd DLC films and ionic liquids for wear and corrosion resistancecitations
- 2023Tribological Behavior of Doped DLC Coatings in the Presence of Ionic Liquid Additive under Different Lubrication Regimescitations
- 2023Impact of Temperature Variation on Friction Behaviour of Rare Earth-Doped Diamond-like Carbon Coatings with Ionic Liquid Lubricantscitations
- 2023Tribological Performance of Gd-DLC and Eu-DLC Coatings in the Presence of Synthetic Oils Containing Ionic Liquid Additivescitations
- 2023Assessment of thermomechanical stability of DLC films deposited by Ne-HiPIMS technology for high-temperature applicationscitations
- 2023Wettability and corrosion resistance of zirconium nitride films obtained via reactive high-power impulse magnetron sputteringcitations
- 2023Structural, mechanical and tribological properties of WCTiN coatings produced by HiPIMScitations
- 2023Effect of Substrate Bias Voltage on Microstructure and Mechanical Properties of Cr-Nb-Ti-Zr-N-O Ceramic Thin Films Produced by Reactive Sputteringcitations
- 2023Insights into the oxidation resistance mechanism and tribological behaviors of multilayered TiSiN/CrVxN hard coatingscitations
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article
Effect of Substrate Bias Voltage on Microstructure and Mechanical Properties of Cr-Nb-Ti-Zr-N-O Ceramic Thin Films Produced by Reactive Sputtering
Abstract
<jats:p>Hard coatings are applied in various applications to protect substrates from wear and corrosion. In the present study, multi-element ceramic films are deposited by reactive sputtering. The level of substrate bias voltage (−50, −125 and −200 V) is changed to investigate the structural and mechanical properties of Cr-Nb-Ti-Zr-N thin films. Chemical analysis (using EDS, XRD and Raman spectroscopy) reveals that these thin films (with a high amount of oxygen) are composed of a nanocomposite phase structure (amorphous and nano-crystalline phases). CrO2 and NbxN crystalline phases exist in an amorphous matrix in the coatings. By increasing the substrate voltage (from −50 to −200 V), the nitrogen content (from 30 to 40 at. %) increases, and CrxN crystalline phases are generated in S125 and S200. Morphological, topological and image analysis (employing FESEM and AFM) data show that the intermediate level of substrate bias voltage (sample S125) can produce a uniform surface with minimum defect density (15%). In addition, S125 has the minimum level of roughness (16.6 nm), skewness (0.2) and kurtosis (2.8). Therefore, the hardness, toughness and wear resistance (extracted from indentation and scratch tests) of this sample is maximum (H is 24.5 GPa and H/E is 0.107), while sample S50 shows complete fracture and delamination.</jats:p>