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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Baule, Nina
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Publications (7/7 displayed)
- 2024The effect of microstructure and film composition on the mechanical properties of linear antenna CVD diamond thin filmscitations
- 2024Material Properties and Electrochemical Applications of ta-C:N Thin Films Deposited by Laser-Arccitations
- 2022Single-beam ion source enhanced growth of transparent conductive thin filmscitations
- 2022Pulsed direct-current reactive sputtering of high Young's modulus [002] oriented aluminum nitride thin filmscitations
- 2022Growth of Highly Transparent Amorphous Carbon Films Using Beam Plasma Sourcecitations
- 2021Boride-Carbon hybrid technology for ultra-wear and corrosive conditionscitations
- 2021Boride-Carbon Hybrid Technology for Ultra-Wear and Corrosive Conditionscitations
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article
Growth of Highly Transparent Amorphous Carbon Films Using Beam Plasma Source
Abstract
<jats:p>A single beam plasma source was used to deposit hydrogenated amorphous carbon (a-C:H) coatings at room temperature. Using methane source gas, a-C:H coatings were deposited at different radio frequency (RF) power to fabricate transparent and durable coatings. The film deposition rate was almost linearly proportional to the ion source power. Hydrogenated amorphous carbon films of ~100 nm thickness appeared to be highly transparent from UV to the infrared range with a transmittance of ~90% and optical bandgap of ~3.7 eV. The coatings also possess desirable mechanical properties with Young’s modulus of ~78 GPa and density of ~1.9 g/cm3. The combined material properties of high transmittance and high durability make the ion-source-deposited a-C:H coatings attractive for many applications.</jats:p>