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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Deluca, Marco
Laboratori Guglielmo Marconi (Italy)
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (20/20 displayed)
- 2024Synergistic Homovalent and Heterovalent Substitution Effects on Piezoelectric and Relaxor Behavior in Lead-Free BaTiO3 Ceramicscitations
- 2022Origin of Relaxor Behavior in Barium‐Titanate‐Based Lead‐Free Perovskitescitations
- 2022Influence of B content on microstructure, phase composition and mechanical properties of CVD Ti(B,N) coatingscitations
- 2022Raman Spectroscopy as a Key Method to Distinguish the Ferroelectric Orthorhombic Phase in Thin ZrO2-Based Filmscitations
- 2020Ceramic processing and multiferroic properties of the perovskite YMnO3-BiFeO3 binary systemcitations
- 2020B-site vacancy induced Raman scattering in BaTiO3-based ferroelectric ceramicscitations
- 2020Mechanical properties of zirconia ceramics biomimetically coated with calcium deficient hydroxyapatitecitations
- 2020Improving of ferroelectric and magnetic properties of Bi5Ti3FeO15 multiferroic materials with Y3+ and Co2+ partial substitution
- 2019FERROELECTRIC, MAGNETIC AND RAMAN SPECTRA MEASUREMENTS OF Bi5Ti3FeO15 AURIVILLIUS-BASED MULTIFERROIC MATERIALS
- 2019PHOTOCATALYTIC PROPERTIES OF BiFeO3 AND Bi5Ti3FeO15 BASED POWDERS
- 2018Remarkable impact of low BiYbO3 doping levels on the local structure and phase transitions of BaTiO3citations
- 2018Structure-property correlations and origin of relaxor behaviour in BaCexTi1-xO3citations
- 2018CuO Thin Films Functionalized with Gold Nanoparticles for Conductometric Carbon Dioxide Gas Sensingcitations
- 2016Integrated experimental and computational approach for residual stress investigation near through-silicon viascitations
- 2015Core-Shell Lead-Free Piezoelectric Ceramics: Current Status and Advanced Characterization of the Bi1/2Na1/2TiO3-SrTiO3 System
- 2015Processing-property relationship for solid-state synthesized CuAlO2 ceramic
- 2015Local distortions in nanostructured ferroelectric ceramics through strain tuningcitations
- 2015Chemical and structural effects on the high-temperature mechanical behavior of (1-x)(Na1/2Bi1/2)TiO3-xBaTiO(3) ceramicscitations
- 2014Nanostructuring effects in piezoelectric BiScO 3- PbTiO 3 ceramicscitations
- 2013Probing structural changes in Ca(1-x)Nd2x/3TiO3 ceramics by Raman spectroscopycitations
Places of action
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article
CuO Thin Films Functionalized with Gold Nanoparticles for Conductometric Carbon Dioxide Gas Sensing
Abstract
<jats:p>Metal oxides (MOx) are a well-established material for gas sensing. MOx-based gas sensors are sensitive to a wide variety of gases. Furthermore, these materials can be applied for the fabrication of low-cost and -power consumption devices in mass production. The market of carbon dioxide (CO2) gas sensors is mainly dominated by infra-red (IR)-based gas sensors. Only a few MOx materials show a sensitivity to CO2and so far, none of these materials have been integrated on CMOS platforms suitable for mass production. In this work, we report a cupric oxide (CuO) thin film-based gas sensor functionalized with gold (Au) nanoparticles, which exhibits exceptional sensitivity to CO2. The CuO-based gas sensors are fabricated by electron beam lithography, thermal evaporation and lift-off process to form patterned copper (Cu) structures. These structures are thermally oxidized to form a continuous CuO film. Gold nanoparticles are drop-coated on the CuO thin films to enhance their sensitivity towards CO2. The CuO thin films fabricated by this method are already sensitive to CO2; however, the functionalization of the CuO film strongly increases the sensitivity of the base material. Compared to the pristine CuO thin film the Au functionalized CuO film shows at equal operation temperatures (300∘C) an increase of sensitivity towards the same gas concentration (e.g., 2000 ppm CO2) by a factor of 13. The process flow used to fabricate Au functionalized CuO gas sensors can be applied on CMOS platforms in specific post processing steps.</jats:p>