| People | Locations | Statistics |
|---|---|---|
| Naji, M. |
| |
| Motta, Antonella |
| |
| Aletan, Dirar |
| |
| Mohamed, Tarek |
| |
| Ertürk, Emre |
| |
| Taccardi, Nicola |
| |
| Kononenko, Denys |
| |
| Petrov, R. H. | Madrid |
|
| Alshaaer, Mazen | Brussels |
|
| Bih, L. |
| |
| Casati, R. |
| |
| Muller, Hermance |
| |
| Kočí, Jan | Prague |
|
| Šuljagić, Marija |
| |
| Kalteremidou, Kalliopi-Artemi | Brussels |
|
| Azam, Siraj |
| |
| Ospanova, Alyiya |
| |
| Blanpain, Bart |
| |
| Ali, M. A. |
| |
| Popa, V. |
| |
| Rančić, M. |
| |
| Ollier, Nadège |
| |
| Azevedo, Nuno Monteiro |
| |
| Landes, Michael |
| |
| Rignanese, Gian-Marco |
|
Krekeler, Tobias
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (19/19 displayed)
- 2023Effect of Gd solutes on the micromechanical response of twinning and detwinning in Mgcitations
- 2023Wafer-Scale Fabrication of Hierarchically Porous Silicon and Silica Glass by Active Nanoparticle-Assisted Chemical Etching and Pseudomorphic Thermal Oxidationcitations
- 2023Magnetron Sputter Grown AlN Nanostructures with Giant Piezoelectric Response toward Energy Generationcitations
- 2023Magnetron Sputter Deposition of Nanostructured AlN Thin Filmscitations
- 2022Strengthening Engineered Nanocrystal Three-Dimensional Superlattices via Ligand Conformation and Reactivitycitations
- 2021Defects and plasticity in ultrastrong supercrystalline nanocompositescitations
- 2021Simultaneous enhancement of actuation strain and mechanical strength of nanoporous Ni–Mn actuatorscitations
- 2020Giant electrochemical actuation in a nanoporous silicon-polypyrrole hybrid materialcitations
- 2019Hierarchical supercrystalline nanocomposites through the self-assembly of organically-modified ceramic nanoparticlescitations
- 2019Hierarchical supercrystalline nanocomposites through the self-assembly of organically-modified ceramic nanoparticles
- 2019Hierarchical supercrystalline nanocomposites through the self-assembly of organically-modified ceramic nanoparticlescitations
- 2019Alumina-doped zirconia submicro-particles : synthesis, thermal stability, and microstructural characterizationcitations
- 2019Synthesis and thermal stability of ZrO2@SiO2 core-shell submicron particlescitations
- 2019Alumina-Doped Zirconia Submicro-Particles: Synthesis, Thermal Stability, and Microstructural Characterizationcitations
- 2019Modulating the Mechanical Properties of Supercrystalline Nanocomposite Materials via Solvent–Ligand Interactionscitations
- 2018Photonic materials for high-temperature applications: synthesis and characterization by X-ray ptychographic tomography
- 2017Semiordered hierarchical metallic network for fast and large charge-induced straincitations
- 2017Exceptionally strong, stiff and hard hybrid material based on an elastomer and isotropically shaped ceramic nanoparticlescitations
- 2017Highly porous α-Al 2 O 3 ceramics obtained by sintering atomic layer deposited inverse opals
Places of action
| Organizations | Location | People |
|---|
article
Magnetron Sputter Deposition of Nanostructured AlN Thin Films
Abstract
Aluminum nitride (AlN) is a material of growing interest for power electronics, fabrication of sensors, micro-electromechanical systems, and piezoelectric generators. For the latter, the formation of nanowire arrays or nanostructured films is one of the emerging research directions. In the current work, nanostructured AlN films manufactured with normal and glancing angle<br/>magnetron sputter depositions have been investigated with scanning and transmission electron microscopy, X-ray diffraction, atomic force microscopy, and optical spectroscopy. Growth of the nanostructures was realized utilizing metal seed particles (Ag, Au, and Al), allowing the control of the nucleation and following growth of AlN. It was demonstrated how variations of seed particle<br/>material and size can be used to tune the parameters of nanostructures and morphology of the AlN films. Using normal angle deposition allowed the growth of bud-shaped structures, which consisted of pillars/lamellae with wurtzite-like crystalline structures. Deposition at a glancing angle of 85° led to a film of individual nanostructures located near each other and tilted at an angle of 33° relative to the surface normal. Such films maintained a high degree of wurtzite-like crystallinity but had a more open structure and higher roughness than the nanostructured films grown at normal incidence deposition. The developed production strategies and recipes for controlling parameters of nanostructured films pave the way for the formation of matrices to be used in piezoelectric<br/>applications.