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| Azevedo, Nuno Monteiro |
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Pedersen, Kjeld
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Topics
Publications (10/10 displayed)
- 2023Magnetron Sputter Grown AlN Nanostructures with Giant Piezoelectric Response toward Energy Generationcitations
- 2023Magnetron Sputter Deposition of Nanostructured AlN Thin Filmscitations
- 2019Structure and properties of Ta/Al/Ta and Ti/Al/Ti/Au multilayer metal stacks formed as ohmic contacts on n-GaNcitations
- 2018Ultra-thin titanium nitride films for refractory spectral selectivity [Invited]citations
- 2018Ultra-thin titanium nitride films for refractory spectral selectivitycitations
- 2018Optical characterization of SiC films grown on Si(111)
- 2018Optical characterization of SiC films grown on Si(111)
- 2017Growth of aluminum oxide on silicon carbide with an atomically sharp interfacecitations
- 2016Atomically controlled, self-limiting procedures for growth of aluminum oxide on SiC-on-Si
- 2015Electric field mapping inside metallized film capacitorscitations
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article
Magnetron Sputter Deposition of Nanostructured AlN Thin Films
Abstract
Aluminum nitride (AlN) is a material of growing interest for power electronics, fabrication of sensors, micro-electromechanical systems, and piezoelectric generators. For the latter, the formation of nanowire arrays or nanostructured films is one of the emerging research directions. In the current work, nanostructured AlN films manufactured with normal and glancing angle<br/>magnetron sputter depositions have been investigated with scanning and transmission electron microscopy, X-ray diffraction, atomic force microscopy, and optical spectroscopy. Growth of the nanostructures was realized utilizing metal seed particles (Ag, Au, and Al), allowing the control of the nucleation and following growth of AlN. It was demonstrated how variations of seed particle<br/>material and size can be used to tune the parameters of nanostructures and morphology of the AlN films. Using normal angle deposition allowed the growth of bud-shaped structures, which consisted of pillars/lamellae with wurtzite-like crystalline structures. Deposition at a glancing angle of 85° led to a film of individual nanostructures located near each other and tilted at an angle of 33° relative to the surface normal. Such films maintained a high degree of wurtzite-like crystallinity but had a more open structure and higher roughness than the nanostructured films grown at normal incidence deposition. The developed production strategies and recipes for controlling parameters of nanostructured films pave the way for the formation of matrices to be used in piezoelectric<br/>applications.