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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Van Helden, Jean-Pierre H.
Leibniz Institute for Plasma Science and Technology
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (7/7 displayed)
- 2023The Interplay Effects between Feed-Gas Composition and Bias Plasma Condition during Active-Screen Plasma Nitrocarburizing with a Solid Carbon Sourcecitations
- 2022Influence of Plasma Power and Oxygen-Containing Process Gases in Active Screen Plasma Nitrocarburizing with Carbon Solid Source*
- 2021Influence of oxygen admixture on plasma nitrocarburizing process and monitoring of an active screen plasma treatmentcitations
- 2021Effects of Plasma-Chemical Composition on AISI 316L Surface Modification by Active Screen Nitrocarburizing Using Gaseous and Solid Carbon Precursorscitations
- 2020Influence of the active screen plasma power during afterglow nitrocarburizing on the surface modification of aisi 316lcitations
- 2020On the relationship between SiF4plasma species and sample properties in ultra low-k etching processes
- 2020Solid carbon active screen plasma nitrocarburizing of AISI 316L stainless steel in cold wall reactor: influence of plasma conditionscitations
Places of action
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article
Influence of oxygen admixture on plasma nitrocarburizing process and monitoring of an active screen plasma treatment
Abstract
The effect of a controlled oxygen admixture to a plasma nitrocarburizing process using active screen technology and an active screen made of carbon was investigated to control the carburizing potential within the plasma-assisted process. Laser absorption spectroscopy was used to determine the resulting process gas composition at different levels of oxygen admixture using O2 and CO2, respectively, as well as the long-term trends of the concentration of major reaction products over the duration of a material treatment of ARMCO® iron. The short-term studies of the resulting process gas composition, as a function of oxygen addition to the process feed gases N2 and H2, showed that a stepwise increase in oxygen addition led to the formation of oxygen-containing species, such as CO, CO2, and H2O, and to a significant decrease in the concentrations of hydrocarbons and HCN. Despite increased oxygen concentration within the process gas, no oxygen enrichment was observed in the compound layer of ARMCO® iron; however, the diffusion depth of nitrogen and carbon increased significantly. Increasing the local nitrogen concentration changed the stoichiometry of the ε-Fe3(N,C)1+x phase in the compound layer and opens up additional degrees of freedom for improved process control.