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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Li, R.
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (25/25 displayed)
- 2022Large Field of View and Artifact-Free Plan View TEM Specimen Preparation by Post-FIB Ar Milling
- 2022A CPFEM based theoretical analysis of strains resolved by the microstructural feature tracking methodcitations
- 2022A CPFEM based theoretical analysis of strains resolved by the microstructural feature tracking methodcitations
- 2021A phase-field investigation of recrystallization boundary migration into heterogeneous deformation energy fields: Effects of dislocation boundary sharpnesscitations
- 2020Cutting-Edge Sample Preparation from FIB to Ar Concentrated Ion Beam Milling of Advanced Semiconductor Devices
- 2019Microscopic nonequilibrium energy transfer dynamics in a photoexcited metal/insulator heterostructurecitations
- 2019Addition of the lewis acid Zn(C6 F5 )2 enables organic transistors with a maximum hole mobility in excess of 20 cm2 V-1 s-1citations
- 2018Gate-controlled quantum dots and superconductivity in planar germaniumcitations
- 2018On the effect of confinement on the structure and properties of small-molecular organic semiconductorscitations
- 2017A novel type of Co–Ti–Cr-base γ/γ<sup>′</sup> superalloys with low mass densitycitations
- 2016Vertical phase separation in small molecule: polymer blend organic thin film transistors can be dynamically controlledcitations
- 2016Confinement effects on the crystalline features of poly(9,9-dioctylfluorene)citations
- 2016Elemental partitioning, lattice misfit and creep behaviour of Cr containing gamma ' strengthened Co base superalloyscitations
- 2012Triple yielding and deformation mechanisms in metastable Cu <inf>47.5</inf>Zr <inf>47.5</inf>Al <inf>5</inf> compositescitations
- 2011The influence of in situ formed precipitates on the plasticity of Fe-Nb-B-Cu bulk metallic glassescitations
- 2011<inf>96</inf>Nb<inf>4</inf> metallic glasses with small Cu additionscitations
- 2011Nanocomposite characterization on multiple length scales using microSAXScitations
- 2011(Fe(0.5)Co(0.5))(0.75)B(0.20)Si(0.05) (96)Nb(4) Metallic Glasses with Small Cu Additionscitations
- 2011Strategy for pinpointing the formation of B2 CuZr in metastable CuZr-based shape memory alloyscitations
- 2010Thermal stability and magnetic properties of FeCoBSiNb bulk metallic glassescitations
- 2010Mechanical properties of rapidly solidified Fe-Al-B ternary alloyscitations
- 2009Crystallization and magnetic properties of [(Fe,Co)<inf>0.75</inf>Si <inf>0.05</inf>B<inf>0.20</inf>]<inf>94</inf>Nb<inf>6</inf> metallic glassescitations
- 2009Effect of minor Cu addition on phase evolution and magnetic properties of {[(Fe<inf>0.5</inf>Co<inf>0.5</inf>)<inf>0.75</inf>Si<inf>0.05</inf>B <inf>0.20</inf>]<inf>0.96</inf>Nb<inf>0.04</inf>}<inf>100-x</inf> Cu<inf>x</inf> alloyscitations
- 2006ZnCdSe-ZnSe cladded quantum dots using photoassisted microwave plasma enhanced metalorganic chemical vapor deposition for lasers and electroluminescent phosphors
- 2006ZnCdSe-ZnSe cladded quantum dots using Photoassisted Microwave Plasma (PMP) enhanced metalorganic chemical vapor deposition for lasers and electroluminescent phosphors
Places of action
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article
Large Field of View and Artifact-Free Plan View TEM Specimen Preparation by Post-FIB Ar Milling
Abstract
<jats:title>Abstract</jats:title><jats:p>Semiconductor devices are decreasing in dimensions and currently comprise stacks of ultrathin layers as in a spin-transfer torque magnetoresistive random-access memory (STTMRAM) device. For successful characterization by transmission electron microscopy (TEM) for failure analysis and device development, an accurate and controllable thinning of TEM specimens for is desirable. In this work, we combine plan view Ga focused ion beam (FIB) and post-FIB Ar milling preparation to prepare TEM specimens from a STT-MRAM device. Post-FIB Ar milling technique as a final polishing step of plan view TEM specimens was shown to prevent exposure of the tunnel barrier layer that can be damaged by the Ga FIB beam. We discuss the plan view FIB preparation, post-FIB Ar milling step and image analysis of the TEM images.</jats:p>