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Imrich, P. J.
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article
Sample Preparation by Metallography and Focused Ion Beam for Nanomechanical Testing
Abstract
<jats:title>Abstract</jats:title><jats:p>Mechanical size effects in micron and submicron scale sample testing are of immense interest in materials science. In this work, we report on a combination of structured chemical etching and focused ion beam fabrication to allow site specific and time efficient fabrication of miniaturized specimens for mechanical testing. Further, we demonstrate the applicability of these samples for quantitative in situ experiments in the scanning and transmission electron microscopes.</jats:p>