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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Palisaitis, Justinas
Linköping University
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (41/41 displayed)
- 2024The Influence of Carbon on Polytype and Growth Stability of Epitaxial Hexagonal Boron Nitride Filmscitations
- 2024On the origin of epitaxial rhombohedral-B4C growth by CVD on 4H-SiC†citations
- 2024Advanced film/substrate interface engineering for adhesion improvement employing time- and energy-controlled metal ion irradiationcitations
- 2024TiB1.8 single layers and epitaxial TiB2-based superlattices by magnetron sputtering using a TiB (Ti:B = 1:1) targetcitations
- 2024Enhanced quality of single crystal CrBx/TiBy diboride superlattices by controlling boron stoichiometry during sputter depositioncitations
- 2024Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by <i>in situ</i> scanning transmission electron microscopy
- 2024Enhanced photocatalytic performance of a rGO-Ca2Fe2O5 nanocomposite for photodegradation of emergent pollutantscitations
- 2024On the origin of epitaxial rhombohedral-B<sub>4</sub>C growth by CVD on 4H-SiCcitations
- 2024Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by in situ scanning transmission electron microscopy
- 2023The influence of carbon on polytype and growth stability of epitaxial hexagonal boron nitride films and layerscitations
- 2023Discovery of Guinier-Preston zone hardening in refractory nitride ceramicscitations
- 2022Synthesis and characterization of TiB x (1.2 ≤ x ≤ 2.8) thin films grown by DC magnetron co-sputtering from TiB 2 and Ti targetscitations
- 2022Epitaxial Growth of CaMnO3–y Films on LaAlO3 (11‾20) by Pulsed Direct Current Reactive Magnetron Sputteringcitations
- 2022Synthesis and characterization of TiBx (1.2 ≤ x ≤ 2.8) thin films grown by DC magnetron co-sputtering from TiB2 and Ti targetscitations
- 2022Epitaxial Growth of CaMnO3-y Films on LaAlO3 (112 over bar 0) by Pulsed Direct Current Reactive Magnetron Sputteringcitations
- 2022Synthesis and characterization of TiBx (1.2=x=2.8) thin films grown by DC magnetron co-sputtering from TiB2 and Ti targetscitations
- 2022On the nature of planar defects in transition metal diboride line compoundscitations
- 2021Age hardening in superhard ZrB2-rich Zr1-xTaxBy thin filmscitations
- 2021Hexacoordinated Gallium(III) Triazenide Precursor for Epitaxial Gallium Nitride by Atomic Layer Deposition
- 2021Synthesis and characterisation of nanocomposite Mo-Fe-B thin films deposited by magnetron sputteringcitations
- 2021Use of cleaved wedge geometry for plan-view transmission electron microscopy sample preparationcitations
- 2020The effects of microstructure, Nb content and secondary Ruddlesden–Popper phase on thermoelectric properties in perovskite CaMn1−xNbxO3 (x = 0–0.10) thin filmscitations
- 2020The effects of microstructure, Nb content and secondary Ruddlesden–Popper phase on thermoelectric properties in perovskite CaMn1−xNbxO3 (x = 0–0.10) thin filmscitations
- 2020High-Selectivity Growth of GaN Nanorod Arrays by Liquid-Target Magnetron Sputter Epitaxycitations
- 2020The influence of pressure and magnetic field on the deposition of epitaxial TiBx thin films from DC magnetron sputteringcitations
- 2020Improving the high-temperature oxidation resistance of TiB2 thin films by alloying with Alcitations
- 2020The effects of microstructure, Nb content and secondary Ruddlesden-Popper phase on thermoelectric properties in perovskite CaMn1-xNbxO3 (x=0-0.10) thin filmscitations
- 2019Graphene-based plasmonic nanocomposites for highly enhanced solar-driven photocatalytic activitiescitations
- 2019Graphene-based plasmonic nanocomposites for highly enhanced solar-driven photocatalytic activitiescitations
- 2019Controlling the Organization of PEDOT:PSS on Cellulose Structurescitations
- 2018Synthesis of Two-Dimensional Nb1.33C (MXene) with Randomly Distributed Vacancies by Etching of the Quaternary Solid Solution (Nb2/3Sc1/3)2AlC MAX Phasecitations
- 2018Resolving the debated atomic structure of the metastable cubic SiNx tissue phase in nanocomposites with TiNcitations
- 2016Nucleation and core-shell formation mechanism of self-induced InxAl1−xN core-shell nanorods grown on sapphire substrates by magnetron sputter epitaxycitations
- 2015Structure and properties of Cr–C/Ag films deposited by magnetron sputteringcitations
- 2014Characterization of InGaN/GaN quantum well growth using monochromated valence electron energy loss spectroscopycitations
- 2013Kinetics of Ga droplet decay on thin carbon filmscitations
- 2013Thermal stability of Al1−xInxN (0 0 0 1) throughout the compositional range as investigated during in situ thermal annealing in a scanning transmission electron microscopecitations
- 2011Standard-free composition measurements of Alx In1–xN by low-loss electron energy loss spectroscopycitations
- 2011Spontaneous Formation of AlInN Core–Shell Nanorod Arrays by Ultrahigh-Vacuum Magnetron Sputter Epitaxycitations
- 2011Face-Centered Cubic (Al1-xCrx)2O3citations
- 2011Electron Energy Loss Spectroscopy of III-Nitride Semiconductors
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document
The influence of carbon on polytype and growth stability of epitaxial hexagonal boron nitride films and layers
Abstract
<jats:p>Boron nitride (BN) is a promising two-dimensional material as well as a potential wide-bandgap semiconductor. Chemical vapor deposition (CVD) is commonly used to deposit single layers or thin films of BN, but the deposition process is insufficiently understood at an atomic scale. We study the CVD of BN using two boron precursors, the organoboranes, triethylborane and trimethylborane. Using high resolution (scanning) transmission electron microscopy and electron energy loss spectroscopy we show that hexagonal-BN (h-BN) nucleates and grows epitaxially for ~4 nm before it either polytype transforms to rhombohedral-BN (r-BN), turns to less ordered turbostratic-BN or is terminated by a layer of amorphous carbon. We propose that the carbon in the organoboranes deposits on the epitaxially growing h-BN surface and this either leads to the polytype transition to r-BN, the transition to less ordered BN growth or complete surface poisoning with carbon terminating BN growth. Our results question the use of organoboranes in CVD of epitaxial BN films, and the polytype stability of h-BN growing on graphene.</jats:p>