• Carrington, Peter James

Abstract

<jats:title>Abstract</jats:title><jats:p>ULTRARAM™ is a non-volatile memory with the potential to achieve fast, ultra-low-energy electron storage in a floating gate accessed through a triple-barrier resonant tunnelling heterostructure. Here we report the implementation of ULTRARAM™ on a Si substrate; a vital step towards cost-effective mass production. Sample growth was carried out using molecular beam epitaxy, by first depositing an AlSb nucleation layer to seed the growth of a GaSb buffer layer, followed by the III-V memory epilayers. Fabricated single-cell memories show clear 0/1 logic-state contrast after ≤10-ms duration program/erase pulses of ~2.5 V, a remarkably fast switching speed for 10- and 20-µm devices. Furthermore, the combination of low voltage and small device capacitance per unit area results in a switching energy that is orders of magnitude lower than dynamic random access memory and flash, for a given cell size. Extended testing of the devices revealed retention in excess of 1000 years and degradation-free endurance of over 10<jats:sup>7</jats:sup> program/erase cycles, exceeding very recent results for similar devices on GaAs substrates.</jats:p>

Topics

• impedance spectroscopy
• compound
• semiconductor
• mass spectrometry
• Silicon
• random