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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Kočí, Jan | Prague |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Serrano, Jorge
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document
Monolithic and catalyst-free selective epitaxy of InP nanowires on Silicon
Abstract
<jats:title>Abstract</jats:title><jats:p>The integration of both optical and electronic components on a single chip, despite the challenge, holds the promise of compatibility with CMOS technology and high scalability. Among all candidate materials, III-V semiconductor nanostructures are key ingredients for opto-electronics and quantum optics devices, such as light emitters and harvesters. The control over geometry, and dimensionality of the nanostructures, enables one to modify the band structures, and hence provide a powerful tool for tailoring the opto-electronic properties of III-V compounds. One of the most creditable approaches towards such growth control is the combination of using patterned wafer and the self-assembled epitaxy. This work presents monolithically integrated catalyst-free InP nanowires grown selectively on nanotip-patterned (001)Si substrates using gas-source molecular-beam epitaxy. The substrates are fabricated using CMOS nanotechnology. The dimensionality of the InP structures can be switched between two-dimensional nanowires and three-dimensional bulk-like InP islands by thermally modifying the shape of Silicon nanotips, surrounded by the SiO<jats:sub>2</jats:sub> layer during the oxide-off process. The structural and optical characterization of nanowires indicate the coexistence of both zincblende and wurtzite InP crystal phases in nanowires. The two different crystal structures were aligned with a type-II heterointerface.</jats:p>