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Gonzalez, Nahikari
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document
A New High Precision, Fully Motorized 6-DoF Sample Stage for the ALBA PEEM Endstation
Abstract
A new 6-DOF sample manipulator has been designed for the ALBA Synchrotron PhotoEmission Electron Microscopy (PEEM) experimental station, based on a commercial Elmitec LEEM 3. The new design includes full motorization of all 6 axes with position feedback, no backlash, and maximized stability, crucial to achieve the best spatial resolution of down to 8 nm (in so-called LEEM mode). The in-plane longitudinal and transversal motions with sub-micron resolution are based on high precision linear guides, while the pitch and roll stages (sample tilt), guided by angular guides, are actuated by a double-flexure system, which enhances the overall rigidity of the system. The vertical stage is composed by a high rigidity recirculating roller screw and cross roller guides. Finally, 360° yaw rotation is supplied by a differentially pumped commercial rotary stage. On top of the stage, the sample support is mounted on a customized DN63CF flange. This support keeps the original functionalities of the sample manipulator and holders, with 6 independent electrical contacts, and the possibility to heat the sample up to 2000 K and cool it to 100 K with an improved liquid nitrogen cooling system.