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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Held, Georg
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (11/11 displayed)
- 2022In situ surface analysis of palladium-platinum alloys in methane oxidation conditionscitations
- 2022Following Cu Microstructure Evolution in CuZnO/Al_{2}O_{3}(−Cs) Catalysts During Activation in H_{2} using in situ XRD and XRD-CT
- 2022Identifying chemical and physical changes in wide-gap semiconductors using real-time and near ambient-pressure XPS ; ENEngelskEnglishIdentifying chemical and physical changes in wide-gap semiconductors using real-time and near ambient-pressure XPScitations
- 2022Identifying chemical and physical changes in wide-gap semiconductors using real-time and near ambient-pressure XPScitations
- 2020Understanding metal organic chemical vapour deposition of monolayer WS2: the enhancing role of Au substrate for simple organosulfur precursors.
- 2020Understanding metal organic chemical vapour deposition of monolayer WS<sub>2</sub>: the enhancing role of Au substrate for simple organosulfur precursors.
- 2015The atomic structure of low-index surfaces of the intermetallic compound InPdcitations
- 2012Coverage-dependent molecular tilt of carbon monoxide chemisorbed on Pt{110}: A combined LEED and DFT structural analysiscitations
- 2012Chromium nanostructures formed by dewetting of heteroepitaxial films on W(100)citations
- 2011Epitaxial growth of ultrathin palladium films on Re{0001}citations
- 2010Experimental structure determination of the chemisorbed overlayers of chlorine and iodine on Au{111}citations
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article
Understanding metal organic chemical vapour deposition of monolayer WS<sub>2</sub>: the enhancing role of Au substrate for simple organosulfur precursors.
Abstract
We find that the use of Au substrate allows fast, self-limited WS2 mono-layer growth using a simple sequential exposure pattern of low cost, low toxicity precursors, namely tungsten hexacarbonyl and dimethylsulfide (DMS). We use this model reaction system to fingerprint the technologically important metal organic chemical vapour deposition process by operando X-ray photoelectron spectroscopy (XPS) to address the current lack of understanding of the underlying fundamental growth mechanisms for WS2 and related transition metal dichalcogenides. Au effectively promotes the sulfidation of W with simple organosulfides, enabling WS2 growth with low DMS pressure (<1 mbar) and a suppression of carbon contamination of as-grown WS2, which to date has been a major challenge with this precursor chemistry. Full WS2 coverage can be achieved by one exposure cycle of 10 minutes at 700°C. We discuss our findings in the wider context of previous literature on heterogeneous catalysis, 2D crystal growth, and overlapping process technologies such as atomic layer deposition (ALD) and direct metal conversion, linking to future integrated manufacturing processes for transition metal dichalcogenide layers.