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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Ferrer, Pilar
Diamond Light Source
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (9/9 displayed)
- 2024Volcanic Eruption in the Nanoworld: Efficient Oxygen Exchange at the Si/SnO<sub>2</sub> Interface
- 2024The Role of Salt Concentration in Stabilizing Charged Ni-Rich Cathode Interfaces in Li-ion Batteries
- 2022Identifying chemical and physical changes in wide-gap semiconductors using real-time and near ambient-pressure XPS ; ENEngelskEnglishIdentifying chemical and physical changes in wide-gap semiconductors using real-time and near ambient-pressure XPScitations
- 2022Identifying chemical and physical changes in wide-gap semiconductors using real-time and near ambient-pressure XPScitations
- 2021Influence of the synthesis parameters on the proton exchange membrane fuel cells performance of Fe–N–C aerogel catalystscitations
- 2020Understanding metal organic chemical vapour deposition of monolayer WS2: the enhancing role of Au substrate for simple organosulfur precursors.
- 2020Understanding metal organic chemical vapour deposition of monolayer WS<sub>2</sub>: the enhancing role of Au substrate for simple organosulfur precursors.
- 2014Synthesis and crystal structure of the novel metal organic framework Zn(C3H5NO2S)2citations
- 2012A flow-through reaction cell forin situX-ray diffraction and absorption studies of heterogeneous powder–liquid reactions and phase transformationscitations
Places of action
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article
Understanding metal organic chemical vapour deposition of monolayer WS<sub>2</sub>: the enhancing role of Au substrate for simple organosulfur precursors.
Abstract
We find that the use of Au substrate allows fast, self-limited WS2 mono-layer growth using a simple sequential exposure pattern of low cost, low toxicity precursors, namely tungsten hexacarbonyl and dimethylsulfide (DMS). We use this model reaction system to fingerprint the technologically important metal organic chemical vapour deposition process by operando X-ray photoelectron spectroscopy (XPS) to address the current lack of understanding of the underlying fundamental growth mechanisms for WS2 and related transition metal dichalcogenides. Au effectively promotes the sulfidation of W with simple organosulfides, enabling WS2 growth with low DMS pressure (<1 mbar) and a suppression of carbon contamination of as-grown WS2, which to date has been a major challenge with this precursor chemistry. Full WS2 coverage can be achieved by one exposure cycle of 10 minutes at 700°C. We discuss our findings in the wider context of previous literature on heterogeneous catalysis, 2D crystal growth, and overlapping process technologies such as atomic layer deposition (ALD) and direct metal conversion, linking to future integrated manufacturing processes for transition metal dichalcogenide layers.