• Neumeier, Karl
• Pichler, Peter
• Johnsson, Anna
• Lerch, Wilfried
• Cristiano, Fuccio
• Eisele, Ignaz
• Burenkov, Alexander
• Eckert, Dirk
• Sturm-Rogon, Leonhard

Abstract

<jats:title>Abstract</jats:title><jats:p>Low leakage diodes are necessary in order to manufacture high-quality variable capacitance diodes (varicaps), which are used in voltage-controlled oscillators. Junction leakage current affects the single sideband noise of the oscillator by up-conversion of 1/<jats:italic>f</jats:italic> and shot noise (Chan et al. in IEEE Trans Electron Devices 54(9):2570–2573, 2007, <jats:ext-link xmlns:xlink="http://www.w3.org/1999/xlink" ext-link-type="doi" xlink:href="10.1109/TED.2007.903201">https://doi.org/10.1109/TED.2007.903201</jats:ext-link>). Several sources show higher leakage current for RTP compared to furnace anneal (Lunnon et al. in J Electrochem Soc 132(10):2473, 1985, <jats:ext-link xmlns:xlink="http://www.w3.org/1999/xlink" ext-link-type="doi" xlink:href="10.1149/1.2113602">https://doi.org/10.1149/1.2113602</jats:ext-link>, Gramenova et al. in J Electrochem Soc 146(1):359, 1999, <jats:ext-link xmlns:xlink="http://www.w3.org/1999/xlink" ext-link-type="doi" xlink:href="10.1149/1.1391613">https://doi.org/10.1149/1.1391613</jats:ext-link>, Mikoshiba et al. in Jpn J Appl Phys, 1986, <jats:ext-link xmlns:xlink="http://www.w3.org/1999/xlink" ext-link-type="doi" xlink:href="10.1143/jjap.25.l631">https://doi.org/10.1143/jjap.25.l631</jats:ext-link>). In our experiments, we found lower leakage currents for RTP compared to furnace annealing. We present results from annealing experiments where we compare three annealing conditions with and without oxidizing annealing conditions.</jats:p><jats:p><jats:bold>Graphical abstract</jats:bold></jats:p>

Topics

• experiment
• annealing