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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Liu, Ming
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (17/17 displayed)
- 2024High dielectric filler for all-solid-state lithium metal batterycitations
- 2023Discharge performance of a high temperature phase change material with low-cost wire meshcitations
- 2023Hydrophobized MFC as Reinforcing Additive in Industrial Silica/SBR Tire Tread Compoundcitations
- 2022Cage Molecules Stabilize Lead Halide Perovskite Thin Filmscitations
- 2021Chemical degradation in Thermally Cycled Stainless Steel 316 with High-Temperature Phase Change Materialcitations
- 2019Barely Porous Organic Cages for Hydrogen Isotope Separationcitations
- 2018Investigation into the behaviour of aluminium and steel under melt/freeze cyclic conditionscitations
- 2017A eutectic salt high temperature phase change material: Thermal stability and corrosion of SS316 with respect to thermal cyclingcitations
- 2016Stability and corrosion testing of a high temperature phase change material for CSP applicationscitations
- 2016Review on concentrating solar power plants and new developments in high temperature thermal energy storage technologiescitations
- 2015Atomic Layer Deposited Hybrid Organic-Inorganic Aluminates as Potential Low-k Dielectric Materialscitations
- 2010Electrochemical reactivity, surface composition and corrosion mechanisms of the complex metallic alloy Al 3 Mg 2citations
- 2010The influence of yttrium (Y) on the corrosion of Mg-Y binary alloyscitations
- 2009A preliminary quantitative XPS study of the surface films formed on pure magnesium and on magnesium-aluminium intermetallics by exposure to high-purity watercitations
- 2009A first quantitative XPS study of the surface films formed, by exposure to water, on Mg and on the Mg-Al intermetallics: Al 3 Mg 2 and Mg 17 Al 12citations
- 2009Calculated phase diagrams and the corrosion of die-cast Mg-Al alloyscitations
- 2008Calculated phase diagrams, iron tolerance limit, and corrosion of Mg-Al alloyscitations
Places of action
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document
Atomic Layer Deposited Hybrid Organic-Inorganic Aluminates as Potential Low-k Dielectric Materials
Abstract
The material properties of atomic layer deposited hybrid organic-inorganic aluminate thin films have been evaluated for potential low dielectric constant (i.e. low-k) applications. The hybrid aluminates were deposited using trimethyl aluminum and various linear and aromatic carboxylic acids. The observed electrical and mechanical properties for the hybrid aluminate films varied greatly depending on the selected organic acid with k values ranging from 2.5 to 5.1 and Young’s modulus ranging from 6 to 40 GPa. Leakage currents as low as 4 x 10-10 A/cm2 (at 2 MV/cm) were obtained for films grown using saturated linear carboxylic acids. These results suggest the potential of ALD hybrid aluminate thin films for low-k dielectric applications.