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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Schubert, Eva
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Topics
Publications (13/13 displayed)
- 2024In-cycle evolution of thickness and roughness parameters during oxygen plasma enhanced ZnO atomic layer deposition using in situ spectroscopic ellipsometry
- 2020Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometrycitations
- 2020Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometrycitations
- 2018Critical-point model dielectric function analysis of WO3 thin films deposited by atomic layer deposition techniquescitations
- 2016Anisotropy, band-to-band transitions, phonon modes, and oxidation properties of cobalt-oxide core-shell slanted columnar thin filmscitations
- 2015Structural and optical properties of cobalt slanted nanopillars conformally coated with few-layer graphenecitations
- 2015Optical anisotropy of porous polymer film with inverse slanted nanocolumnar structure revealed via generalized spectroscopic ellipsometrycitations
- 2012Nanomagnetic skyrmionscitations
- 2012Optical properties of cobalt slanted columnar thin films passivated by atomic layer depositioncitations
- 2012Aging Effects of As-deposited and Passivated Cobalt Slanted Columnar Thin Filmscitations
- 2011Length scales of interactions in magnetic, dielectric, and mechanical nanocompositescitations
- 2007Sub‐Wavelength Antireflection Coatings From Nanostructure Sculptured Thin Filmscitations
- 2005Ion beam sputter deposition of soft x-ray Mo∕Si multilayer mirrorscitations
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article
Aging Effects of As-deposited and Passivated Cobalt Slanted Columnar Thin Films
Abstract
<jats:title>ABSTRACT</jats:title><jats:p>Aging effects of as-deposited and passivated slanted columnar thin films from cobalt determined by generalized ellipsometry within the visible spectral region are reported. Slanted columnar thin films have been grown by glancing angle electron beam deposition and sub-sequently coated with Al<jats:sub>2</jats:sub>O<jats:sub>3</jats:sub> by an atomic layer deposition process. An anisotropic Bruggeman effective medium approximation developed for highly ordered three dimensional metal nanostructures is employed to analyze spectroscopic Mueller matrix ellipsometry data. Our model approach allows for determination of biaxial optical and structural properties as well as fractions of multiple film constituents. While the optical properties of the uncoated film change over time, the alumina passivation layer prevents oxidation in air and therefore aging effects; however, it affects the intrinsic bulk-like Co optical properties.</jats:p>