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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Kaloyeros, Alain E.
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (6/6 displayed)
- 2012Metallization of a Genetically Engineered Polypeptidecitations
- 2007Properties of ultrathin platinum deposited by atomic layer deposition for nanoscale copper-metallization schemescitations
- 2005Spectroellipsometric characterization of Au-Y<sub>2</sub>O<sub>3</sub>–stabilized ZrO<sub>2</sub> nanocomposite filmscitations
- 2004Atomic layer deposition of tantalum nitride for ultrathin liner applications in advanced copper metallization schemescitations
- 2004Chemical Vapor Deposition of ZnS:Mn for Thin-Film Electroluminescent Display Applicationscitations
- 2001MOCVD ZnS:Mn Films: Crystal Structure and Defect Microstructure as a Function of the Growth Parameters
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article
Spectroellipsometric characterization of Au-Y<sub>2</sub>O<sub>3</sub>–stabilized ZrO<sub>2</sub> nanocomposite films
Abstract
<jats:p>Nanocomposite thin films consisting of Au nanoparticles embedded in yttria-stabilized zirconia (YSZ) were synthesized at room temperature by radio frequency magnetron co-sputtering from YSZ and Au targets and subsequently annealed in an argon atmosphere. Au microstructure and particle size were characterized as a function of annealing temperature from 600 to 1000 °C by x-ray diffraction, transmission electron microscopy, scanning electron microscopy, and Rutherford backscattering spectroscopy. Spectroscopic ellipsometry was also used to determine the optical constants of the resulting films. In particular, the refractive index of the nanocomposites was found to undergo an anomalous dispersion in the spectral region where the extinction coefficient achieves its maximum. Additionally, the incorporation of Au in the YSZ matrix was found to increase the refractive index in comparison to that of YSZ. At annealing temperatures higher than 800 °C, a good agreement was found between experimental findings and theoretical models using bulk dielectric functions for Au, as modified to account for a reduced mean free path for scattering than that for free electrons. However, for annealing temperatures below 800 °C, an additional offset was required for the optical constants of Au to obtain good agreement between theory and experiment. This behavior was attributed to a relatively high atomic Au concentration in the YSZ matrix.</jats:p>