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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Ronning, Carsten
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (14/14 displayed)
- 2024Selective Generation of Luminescent Defects in Hexagonal Boron Nitridecitations
- 2023High‐Temperature Laser‐Assisted Synthesis of Boron Nanorods, Nanowires, and Bamboo‐Like Nanotubescitations
- 2023Early oxidation stages of austenitic stainless steel monitored using Mn as tracercitations
- 2023A Combination of Ion Implantation and High‐Temperature Annealing: Donor–Acceptor Pairs in Carbon‐Implanted AlNcitations
- 2022Tuning carrier density and phase transitions in oxide semiconductors using focused ion beamscitations
- 2022Wide‐Bandgap Double Perovskites with Multiple Longitudinal‐Optical Phonon Scatteringcitations
- 2021Fast recovery of ion-irradiation-induced defects in Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub> thin films at room temperaturecitations
- 2020Polarization Dependent Excitation and High Harmonic Generation from Intense Mid-IR Laser Pulses in ZnOcitations
- 2020Hot electrons in a nanowire hard X-ray detectorcitations
- 2019Formation of Ag nanoparticles in Si (100) wafers by single and multiple low energy Ag ions implantationcitations
- 2018Dynamics of nanoparticle morphology under low energy ion irradiationcitations
- 2014Electron-beam-induced current at absorber back surfaces of Cu (In,Ga) Se2 thin-film solar cellscitations
- 2013Controlled synthesis of ultrathin ZnO nanowires using micellar gold nanoparticles as catalyst templatescitations
- 2001Superhard, conductive coatings for atomic force microscopy cantileverscitations
Places of action
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article
Tuning carrier density and phase transitions in oxide semiconductors using focused ion beams
Abstract
<jats:title>Abstract</jats:title><jats:p>We demonstrate spatial modification of the optical properties of thin-film metal oxides, zinc oxide (ZnO) and vanadium dioxide (VO<jats:sub>2</jats:sub>) as representatives, using a commercial focused ion beam (FIB) system. Using a Ga<jats:sup>+</jats:sup> FIB and thermal annealing, we demonstrated variable doping of a wide-bandgap semiconductor, ZnO, achieving carrier concentrations from 10<jats:sup>18</jats:sup> cm<jats:sup>−3</jats:sup> to 10<jats:sup>20</jats:sup> cm<jats:sup>−3</jats:sup>. Using the same FIB without subsequent thermal annealing, we defect-engineered a correlated semiconductor, VO<jats:sub>2</jats:sub>, locally modifying its insulator-to-metal transition (IMT) temperature by up to ∼25 °C. Such area-selective modification of metal oxides by direct writing using a FIB provides a simple, mask-less route to the fabrication of optical structures, especially when multiple or continuous levels of doping or defect density are required.</jats:p>