| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Stieglitz, Thomas
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (11/11 displayed)
- 2024Fabrication and Characterization of PDMS Waveguides for Flexible Optrodescitations
- 2023Bringing sensation to prosthetic hands—chronic assessment of implanted thin-film electrodes in humanscitations
- 2021Plasma Enhanced Atomic Layer Deposition of Iridium Oxide for Application in Miniaturized Neural Implantscitations
- 2021Reliability of Neural Implants—Effective Method for Cleaning and Surface Preparation of Ceramicscitations
- 2020Polyimide-based Thin Film Conductors for High Frequency Data Transmission in Ultra- Conformable Implantscitations
- 2020Flexible Bioelectronic Devices Based on Micropatterned Monolithic Carbon Fiber Mats
- 2020Stability of flexible thin-film metallization stimulation electrodes: analysis of explants after first-in-human study and improvement of in vivo performancecitations
- 2017Improved long-term stability of thin-film glassy carbon electrodes through the use of silicon carbide and amorphous carboncitations
- 2017On Biocompatibility and Stability of Transversal Intrafascicular Multichannel Electrodes—TIMEcitations
- 2016On biocompatibility and stability of transversal intrafascicular multichannel electrodes - TIMEcitations
- 2014Anti-inflammatory polymer electrodes for glial scar treatmentcitations
Places of action
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article
Plasma Enhanced Atomic Layer Deposition of Iridium Oxide for Application in Miniaturized Neural Implants
Abstract
<jats:title>Abstract</jats:title><jats:p>High quality recording of neuronal activities and electrical stimulation require neurotechnical implants with appropriate electrode material. Iridium oxide (IrOx) is an excellent choice of material due to its biocompatibility, low electrochemical impedance, superior charge injection capacity, corrosion resistance, longevity, and electrochemical stability. Plasma enhanced atomic layer deposition (PE-ALD) and a suitable precursor, like (Methylcyclopentadienyl) (1,5- cyclooctadiene) iridium, could be a promising technique to produce highly conformal and performant IrOx-films at low temperatures and low costs. Various studies have reported the deposition of iridium oxide, but usually at very high temperatures. These processes are not suitable for polymer substrates and limit the use of such post-processing together with active implants. In this work the (Methylcyclopentadienyl) (1,5-cyclooctadiene) iridium(I) ((MeCp)Ir(COD)) precursor was used as a promising approach for depositing IrOx-films using low temperature PE-ALD. This precursor is normally used for chemical vapour deposition processes. First experiments were carried out on silicon substrates at deposition temperatures of 110 C°. The precursor was heated up to 75 °C and oxygen plasma was used as coreactant. The deposited films were analysed with EDX and AFM, showing a smooth surface and a promising ratio between the elements iridium and oxygen.</jats:p>