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Reed, Graham
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Publications (6/6 displayed)
- 2021High-bandwidth InGaAs photodetectors heterogeneously integrated on silicon waveguides using optofluidic assemblycitations
- 2020Silicon erasable waveguides and directional couplers by germanium ion implantation for configurable photonic circuitscitations
- 2018Real-time monitoring and gradient feedback enable accurate trimming of ion-implanted silicon photonic devicescitations
- 2017Phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguidescitations
- 2017Post-fabrication phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguidescitations
- 2017Trimming of ring resonators via ion implantation in siliconcitations
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article
Post-fabrication phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguides
Abstract
We demonstrate a novel high-accuracy post-fabrication trimming technique to fine-tune the phase of integrated Mach-Zehnder Interferometers (MZIs), enabling permanent correction of typical fabrication based phase errors. The effective index change of the optical mode is 0.19 in our measurement, which is approximately an order of magnitude improvement compared to previous work with similar excess optical loss. Our measurement results suggest that a phase accuracy of 0.078 rad was achievable with active feedback control.