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| Naji, M. |
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Chen, Xia
University of Southampton
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (11/11 displayed)
- 2020Silicon erasable waveguides and directional couplers by germanium ion implantation for configurable photonic circuitscitations
- 2018Germanium implanted photonic devices for post-fabrication trimming and programmable circuitscitations
- 2018Ion implantation in silicon for trimming the operating wavelength of ring resonatorscitations
- 2018Real-time monitoring and gradient feedback enable accurate trimming of ion-implanted silicon photonic devicescitations
- 2017Towards autonomous testing of photonic integrated circuitscitations
- 2017Phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguidescitations
- 2017Post-fabrication phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguidescitations
- 2017Trimming of ring resonators via ion implantation in siliconcitations
- 2014Silicon-based photonic integration beyond the telecommunication wavelength rangecitations
- 2014Long-wavelength silicon photonic integrated circuits
- 2014Mid-IR heterogeneous silicon photonicscitations
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article
Post-fabrication phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguides
Abstract
We demonstrate a novel high-accuracy post-fabrication trimming technique to fine-tune the phase of integrated Mach-Zehnder Interferometers (MZIs), enabling permanent correction of typical fabrication based phase errors. The effective index change of the optical mode is 0.19 in our measurement, which is approximately an order of magnitude improvement compared to previous work with similar excess optical loss. Our measurement results suggest that a phase accuracy of 0.078 rad was achievable with active feedback control.