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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Jensen, Flemming
Technical University of Denmark
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (32/32 displayed)
- 2020Fabrication of hollow coaxial Al 2 O 3 /ZnAl 2 O 4 high aspect ratio freestanding nanotubes based on the Kirkendall effectcitations
- 2020Fabrication of hollow coaxial Al2O3/ZnAl2O4 high aspect ratio freestanding nanotubes based on the Kirkendall effectcitations
- 2019High Frequency Pulse Anodising of Aluminium for Decorative Applications
- 2019High frequency pulse anodising of recycled 5006 aluminium alloy for optimised decorative appearancecitations
- 2018Experimental observation of Dyakonov plasmons in the mid-infraredcitations
- 2017Advanced fabrication of hyperbolic metamaterials
- 2017Influence of Ti and Cr Adhesion Layers on Ultrathin Au Filmscitations
- 2017Large-scale high aspect ratio Al-doped ZnO nanopillars arrays as anisotropic metamaterials.citations
- 2017Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials for mid-infrared plasmonics
- 2016Fabrication of high aspect ratio TiO2 and Al2O3 nanogratings by atomic layer depositioncitations
- 2016Conductive Oxides Trench Structures as Hyperbolic Metamaterials in Mid-infrared Range
- 2016Fabrication of high aspect ratio TiO 2 and Al 2 O 3 nanogratings by atomic layer depositioncitations
- 2016Fabrication of deep-profile Al-doped ZnO one- and two-dimensional lattices as plasmonic elements
- 2015Friction stir processed Al–TiO2 surface composites: Anodising behaviour and optical appearancecitations
- 2015Effect of High Frequency Pulsing on the Interfacial Structure of Anodised Aluminium-TiO2citations
- 2015Ultra-thin Metal and Dielectric Layers for Nanophotonic Applicationscitations
- 2015Friction stir processed Al-TiO 2 surface composites:Anodising behaviour and optical appearancecitations
- 2015High Frequency Anodising of Aluminium-TiO2 Surface Compositescitations
- 2015Friction stir processed Al-TiO 2 surface composites:DC vs. High frequency pulse and pulse reverse anodising
- 2015High frequency anodising of aluminium–TiO2 surface composites: Anodising behaviour and optical appearancecitations
- 2015Injection molded polymeric hard X-ray lensescitations
- 2015Effect of High Frequency Pulsing on the Interfacial Structure of Anodized Aluminium-TiO2citations
- 2015High frequency anodising of aluminium-TiO 2 surface composites:Anodising behaviour and optical appearancecitations
- 2015Effect of High Frequency Pulsing on the Interfacial Structure of Anodised Aluminium-TiO 2citations
- 2015Friction stir processed Al–TiO 2 surface composites: Anodising behaviour and optical appearancecitations
- 2014Friction stir processed Al - Metal oxide surface composites: Anodization and optical appearance
- 2014Optical appearance of AC anodized Al/TiO 2 composite coatings
- 2014Depositing Materials on the Micro- and Nanoscale
- 2014Microstructure and optical appearance of anodized friction stir processed Al - Metal oxide surface composites
- 2014Optical appearance of AC anodized Al/TiO2 composite coatings
- 2014Etching patterns on the micro‐ and nanoscale
- 2012Dynamic measurement of mercury adsorption and oxidation on activated carbon in simulated cement kiln flue gascitations
Places of action
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article
Large-scale high aspect ratio Al-doped ZnO nanopillars arrays as anisotropic metamaterials.
Abstract
High aspect ratio free-standing Al-doped ZnO (AZO) nanopillars and nanotubes were fabricated using a combination of advanced reactive ion etching and atomic layer<br/>deposition (ALD) techniques. Prior to the pillar and tube fabrication, AZO layers were grown on flat silicon and glass substrates with different Al concentrations at 150-250 °C. For each temperature and Al concentration the ALD growth behavior, crystalline structure, physical, electrical and optical properties were investigated. It was found that AZO films deposited at 250 °C exhibit the most pronounced plasmonic behavior with the highest plasma frequency. During pillar fabrication, AZO conformally passivates the silicon template, which is characteristic of typical ALD growth conditions. The last step of fabrication is heavily dependent on the selective chemistry of the SF6 plasma. It was shown that silicon between AZO structures can be selectively removed with no observable influence on the ALD deposited coatings. The prepared free-standing AZO structures were characterized using Fourier transform infrared spectroscopy (FTIR). The restoration of the effective permittivities of the structures reveals that their anisotropy significantly deviates from the effective medium approximation (EMA) prognoses. It suggests that the permittivity of the AZO in tightly confined nanopillars is very different from that of flat AZO films.