• Prellinger, Günther
• Pollinger, Florian
• Priem, Roland
• Claßen, Ralf
• Krauhausen, Michael

Abstract

<jats:p>Thin metal foils of thicknesses below 100 µm are finding increasing use in high-tech applications. For such foils it is essential that production be controlled inline with sub-micron accuracy in highly challenging environments. An optical thickness gauge combining laser triangulation with multi-wavelength interferometry has now been developed for this purpose. Modulation-based 2f-3f-interferometry was used to realize a compact and robust sensor. A thorough measurement uncertainty analysis of the complete thickness measurement process yielded an expanded measurement uncertainty of <jats:italic>U</jats:italic>=(0.30<jats:italic>μ</jats:italic>m)<jats:sup>2</jats:sup>+4<jats:italic>π</jats:italic><jats:italic>R</jats:italic><jats:sub>a</jats:sub><jats:sup>2</jats:sup>, which is dependent on the roughness average <jats:italic toggle="yes">R</jats:italic><jats:sub>a</jats:sub>. The influence of oil remnants on measurement results is significantly weaker in the interference measurement than in geometric optical systems. Verification measurements against tactile reference measurements support the derived measurement uncertainty, and initial measurements in actual rolling mill environments have proven the real-world capability of this measurement technique over relevant process time scales at metal strip speeds of 200 m/min.</jats:p>

Topics

• impedance spectroscopy
• interferometry