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Chong, Harold
University of Southampton
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (10/10 displayed)
- 2020Laser-driven phase segregation and tailoring of compositionally graded microstructures in Si-Ge nanoscale thin filmscitations
- 2020Laser processed semiconductors for integrated photonic devices
- 2020Laser-written silicon-germanium alloy microstructures with tunable compositionally graded profiles
- 2020Multi-stack insulator to minimise threshold voltage drift in ZnO FET sensors operating in ionic solutionscitations
- 2019Laser processing of amorphous semiconductors on planar substrates for photonic and optoelectronic applications
- 2017Laser annealing of low temperature deposited silicon waveguidescitations
- 2016Large-scale nanoelectromechanical switches based on directly deposited nanocrystalline graphene on insulating substratescitations
- 2015Characterisation of nanographite for MEMS resonators
- 2015A silicon/lithium niobate hybrid photonic material platform produced by laser processing
- 2012Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applicationscitations
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document
Laser annealing of low temperature deposited silicon waveguides
Abstract
We report the fabrication of low temperature deposited polysilicon waveguides using a laser annealing process. Micro-Raman and XRD measurements reveal the quasi-single crystal-like quality of the material, which exhibits low optical losses of 5.13 dB/cm.