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Bhattacharyya, A. S.
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article
Deviation in Nano-Mechanical Properties of Ceramic Nano Composite Thin Films
Abstract
<jats:p>Ceramic hard Coatingsbased on Si, C , N, Ti andB were developed using magnetron sputtering, applicable for protecting the underlying substrate. Different morphological patterns were observed on the coating surface due to sputtering. Nanoindentation was used to determine the hardness and modulus of the coatings. The deviations in H and E values were attributed to indentation positions, thin film stress and anisotropy. Evidence of strain hardening was found during loading.</jats:p>