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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Singh, Chandra Bhal
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Topics
Publications (13/13 displayed)
- 2022Control of Layering in Aurivillius Phase Nanocomposite Thin Films and Influence on Ferromagnetism and Optical Absorptioncitations
- 2020Impact of Samarium on the growth of epitaxial Bismuth ferrite thin films
- 2020Impact of Samarium on the Growth of Epitaxial Bismuth Ferrite Thin Filmscitations
- 2020Nanocomposites with Three-Dimensional Architecture and Impact on Photovoltaic Effectcitations
- 2019Synthesis and dielectric characterization of BaZrNb2O8 high temperature piezoelectric ceramics
- 2019Structural, dielectric, semiconducting and optical properties of high-energy ball milled YFeO3 nano-particles
- 2018Development of Textured Electrode, Index Matching Layer and Nanostructured Materials for Light Trapping inside Photovoltaic devicescitations
- 2018Effect of grain size on structural and dielectric properties of barium titanate piezoceramics synthesized by high energy ball millingcitations
- 2014Effect of Substrate Temperature Variation and Tartarization on micro-Structural and Optical Properties of Pulsed DC Sputtered Hydrogenated ZnO: Al Filmscitations
- 2013Application of SixNy:Hz (SiN) as index matching layer in a-Si:H thin film solar cellscitations
- 2013Raman and FTIR Studies on PECVD Grown Ammonia-Free Amorphous Silicon Nitride Thin Films for Solar Cell Applicationscitations
- 2013Optical and Structural Properties of Ammonia-Free Amorphous Silicon Nitride Thin Films for Photovoltaic Applicationscitations
- 2012Ion-induced secondary electrons emission measurement from MgO films deposited on multiwalled carbon nanotubescitations
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article
Raman and FTIR Studies on PECVD Grown Ammonia-Free Amorphous Silicon Nitride Thin Films for Solar Cell Applications
Abstract
Ammonia- (NH3-) free, hydrogenated amorphous silicon nitride (a-SiNx:H) thin films have been deposited using silane (SiH4) and nitrogen (N2) as source gases by plasma-enhanced chemical vapour deposition (PECVD). During the experiment, SiH4 flow rate has been kept constant at 5 sccm, whereas N2 flow rate has been varied from 2000 to 1600 sccm. The effect of nitrogen flow on SiNx:H films has been verified using Raman analysis studies. Fourier transform Infrared spectroscopy analysis has been carried out to identify all the possible modes of vibrations such as Si–N, Si–H, and N–H present in the films, and the effect of nitrogen flow on these parameters is correlated. The refractive index of the above-mentioned films has been calculated using UV-VIS spectroscopy measurements by Swanepoel’s method.