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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Norkus, Eugenijus
Center for Physical Sciences and Technology
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (30/30 displayed)
- 2024The Dependence of NiMo/Cu Catalyst Composition on Its Catalytic Activity in Sodium Borohydride Hydrolysis Reactionscitations
- 2024Hydrogen and Oxygen Evolution on Flexible Catalysts Based on Nickel–Iron Coatings
- 2024Electrolessly Deposited Cobalt–Phosphorus Coatings for Efficient Hydrogen and Oxygen Evolution Reactions
- 2023Investigation of Hydrogen and Oxygen Evolution on Cobalt-Nanoparticles-Supported Graphitic Carbon Nitridecitations
- 2023Three-dimensional Au(NiMo)/Ti catalysts for efficient oxygen evolution reaction
- 2023Black Liquor and Wood Char-Derived Nitrogen-Doped Carbon Materials for Supercapacitorscitations
- 2023Hydrogen production on CoFe, CoFeMn and CoFeMo coatings deposited on Ni foam via electroless metal platingcitations
- 2023Non-Precious Metals Catalysts for Hydrogen Generationcitations
- 2022Three-Dimensional Au(NiMo)/Ti Catalysts for Efficient Hydrogen Evolution Reactioncitations
- 2022Comparison of the Activity of 3D Binary or Ternary Cobalt Coatings for Hydrogen and Oxygen Evolution Reactionscitations
- 2021Terahertz Photoconductivity Spectra of Electrodeposited Thin Bi Filmscitations
- 2021One-Pot Microwave-Assisted Synthesis of Graphene-Supported PtCoM (M = Mn, Ru, Mo) Catalysts for Low-Temperature Fuel Cellscitations
- 2021Synthesis of Carbon-Supported MnO2 Nanocomposites for Supercapacitors Applicationcitations
- 2020Investigation of Glucose Oxidation on Gold Nanocrystallites Modified Cobalt and Cobalt-Boron Coatings
- 2020Carbon supported manganese(IV)–cobalt(II/III) oxides nanoparticles for high-performance electrochemical supercapacitors
- 2020Investigation of stability of gold nanoparticles modified zinc–cobalt coating in an alkaline sodium borohydride solutioncitations
- 2020Investigation of electro-oxidation of glucose at gold nanoparticles/carbon composites prepared in the presence of halide ionscitations
- 2020Hydrogen Generation from an Alkaline NaBH<sub>4</sub> Solution Using Different Cobalt Catalysts
- 2020Laser-Induced Selective Electroless Plating on PC/ABS Polymer: Minimisation of Thermal Effects for Supreme Processing Speedcitations
- 2020Surfactant-assisted microwave synthesis of carbon supported MnO2 nanocomposites and their application for electrochemical supercapacitorscitations
- 2019Investigation of glucose electro-oxidation on Co and CoB alloy coatings modified with Au nanoparticlescitations
- 2019Comparison of electrocatalytic activity for glucose electrooxidation of gold nanoparticles fabricated by different methodscitations
- 2018Percolation effect of a Cu layer on a MWCNT/PP nanocomposite substrate after laser direct structuring and autocatalytic platingcitations
- 2018Wood-Based Carbon Materials Modified with Cobalt Nanoparticles As Catalysts for Oxygen Reduction and Hydrogen Oxidation
- 2016Platinum-Niobium(V) Oxide/Carbon Nanocomposites Prepared By Microwave Synthesis For Ethanol Oxidation
- 2016Comparative Study of Electroless Platinum Deposition Using Multivalent Metal Ions or Hydrazine As Reducing Agents
- 2016Electroless Deposition of Cobalt-Tungsten-Boron Films from Glycine Containing Solutions As Barrier Layer Against Cu Diffusion
- 2016Colour-Difference Measurement Method for Evaluation of Quality of Electrolessly Deposited Copper on Polymer after Laser-Induced Selective Activationcitations
- 2014Investigation of Borohydride Oxidation on Graphene Supported Gold-Copper Nanocomposites
- 2014Electroless Co-B-P-W Deposition Using DMAB as Reducing Agent
Places of action
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article
Electroless Deposition of Cobalt-Tungsten-Boron Films from Glycine Containing Solutions As Barrier Layer Against Cu Diffusion
Abstract
<jats:p>Electroless cobalt films have been demonstrated to produce high quality barrier and capping layers for Cu. The best barriers so far include, in addition to the cobalt, refractory metals ions (e.g., W, Mo, or Re), and either phosphorus or boron. Electroless cobalt and its alloys can be used in micro- and nano-technologies, e.g. for microelectro-mechanical systems (MEMS), as well as for ultra large-scale integration (ULSI) technology of integrated cicuits. </jats:p><jats:p>In this work we present novel deposition solutions that is used to form cobalt-tungsten-boron films used morpholine borane as reducing agents. The films of cobalt that cointain small amounts of tungsten and boron were deposited by the electroless process. The cobalt-tungsten-boron coatings were deposited on the copper surface using a solutions containing (mol l<jats:sup>-1</jats:sup>): CoSO<jats:sub>4</jats:sub> - 0.1, NH<jats:sub>2</jats:sub>CH<jats:sub>2</jats:sub>COOH (glycine) – 0.2, C<jats:sub>4</jats:sub>H<jats:sub>8</jats:sub>ONH·BH<jats:sub>3</jats:sub> (morpholine borane) – 0.2, Na<jats:sub>2</jats:sub>WO<jats:sub>4</jats:sub> – (0-0.02), C<jats:sub>6</jats:sub>H<jats:sub>8</jats:sub>O<jats:sub>7</jats:sub> (citric acid) – 0.175. The bath operated at pH 7 and 60 ºC. The thickness of the compact cobalt-tungsten-boron coatings obtained under optimal operating conditions were ca. 0.5 µm. The morphology and strukture of the cobalt alloys were characterized by means of Field Emission Scanning Electron Microscopy. The composition of the cobalt-tungsten-boron films obtained was determined by means of X-ray Photoelectron Spectroscopy using an ESCALAB MKII spektrometer. To obtain depht profiles, the sample were etched in the preparation chamber by ionized argon at a vacuum of 5·10<jats:sup>-4</jats:sup> Pa. </jats:p><jats:p>The mikrostructure of the coatings changes with the intercorporation of tungsten into the coatings. The particles of cobalt-tungsten-boron films are larger and almost equilateral as compared with the cobalt-boron particles. XPS depth profile investigation does not show any significant diffusion of Cu atoms into cobalt after heat-treatment of the cobalt-tungsten-boron film. This fact confirms that the cobalt-tungsten-boron thin layer, deposited from glycine containing solutions, serves as a perfect diffucion barrier to prevent Cu diffusion. </jats:p><jats:p>This research was funded by a Grant (No. TEC-06/2015) from the Research Council of Lithuania.</jats:p><jats:p> </jats:p>