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Okholin, P. N.
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article
Graphitic Nanoporous Carbon Thin Films: Fabrication Method, Structural, Electrical and Gas Sensor Properties
Abstract
<jats:p>New method (magnetron plasma enhanced CVD) is suggested to obtain record values of porosity of thin carbon films. Further high temperature annealing results in graphitization of the carbon film and reduction of their resistivity down to 10<jats:sup>2</jats:sup> Ohm×cm. Plasma treatment in forming gas leads to modification both of a surface and bulk thin nanoporous graphitic film that decreases resistivity of the film, reduces sensor sensitivity to water vapour and enhances sensor sensitivity to ammonia gas.</jats:p>