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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Mardare, Ai
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Publications (6/6 displayed)
- 2005Bottom electrode crystallization of Pb(Zr, Ti)O-3 thin films made by RF magnetron sputteringcitations
- 2004Bottom electrode crystallization method for heat treatments on thin filmscitations
- 2003Barium metaplumbate thin film electrodes for ferroelectric devicescitations
- 2003Simple method for crystallizing ceramic thin films using platinum bottom electrodes as resistive heating elementscitations
- 2003Pulsed laser deposition of barium metaplumbate thin films for ferroelectric capacitorscitations
- 2003Deposition of bioactive glass-ceramic thin-films by RF magnetron sputteringcitations
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article
Simple method for crystallizing ceramic thin films using platinum bottom electrodes as resistive heating elements
Abstract
A simple method for crystallizing amorphous thin films was developed using platinum bottom electrodes as heating elements. A current was applied to chromel wires in contact with the platinum and the temperature was measured using a type K thermocouple. A proportional feedback algorithm was used for controlling the process. The optimum parameters for the temperature control were determined and applied to the crystallization of PZT thin films. The results obtained for a heat treatment at 650degreesC with a 15degreesC/s heating and cooling rate showed a pure perovskite phase; the ferroelectric properties were comparable with those from conventional heat treatment methods.