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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Roualdes, Stéphanie
University of Montpellier
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (8/8 displayed)
- 2021Coaxial nanofibers of nickel/gadolinium oxide/nickel oxide as highly effective electrocatalysts for hydrogen evolution reactioncitations
- 2021Coaxial nanofibers of nickel/gadolinium oxide/nickel oxide as highly effective electrocatalysts for hydrogen evolution reactioncitations
- 2021In- and out-plane transport properties of chemical vapor deposited TiO2 anatase filmscitations
- 2019Functionalization of MCM-41 with titanium oxynitride deposited via PECVD for enhanced removal of methylene bluecitations
- 2018Facile fabrication of NiTiO3/graphene nanocomposites for photocatalytic hydrogen generationcitations
- 2018Phosphonic acid-based membranes as proton conductors prepared by a pulsed plasma enhanced chemical vapor deposition techniquecitations
- 2015Optimization of the molecular sieving properties of amorphous SiCXNY:H hydrogen selective membranes prepared by PECVDcitations
- 2009Membranes produced by plasma enhanced chemical vapor deposition technique for low temperature fuel cell applicationscitations
Places of action
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article
Optimization of the molecular sieving properties of amorphous SiCXNY:H hydrogen selective membranes prepared by PECVD
Abstract
International audience ; In this work, low frequency PECVD a-SiCxNy:H thin films have been synthesized in the temperature range 25-300 A degrees C from hexamethyldisilazane precursor mixed with ammonia at various concentrations. A relevant correlation has been evidenced between the [N]/[C] atomic ratio in the gaseous phase and in the deposited thin films, allowing both prediction and control of the film microstructure. A simple method based on the analysis of the films FTIR spectra was proposed to determine the value of the [N]/[C] ratio and thus predict or adjust the gas transport properties of the membrane materials. Attractive ideal selectivities alpha*(He/N2) exceeding 90 with He permeance I (He) > 3.10(-7) mol.s(-1).m(-2).Pa-1 were measured at 150 A degrees C for the films prepared at 300 A degrees C with an optimum [N]/[C] atomic ratio in the range 0.1-1.5. These films behave as molecular sieve membranes with a thermally activated transport of helium.